Excimer laser processing fora-Si and poly-Si thin film transistors for imager applications

J. P. Lu; P. Mei; R. T. Fulks; J. Rahn; J. Ho; Y. Wang; J. B. Boyce; R. A. Street

doi:10.1116/1.582480

Excimer laser processing fora-Si and poly-Si thin film transistors for imager applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582480 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1823-1829 ◽

Cited By ~ 11

Author(s):

J. P. Lu ◽

P. Mei ◽

R. T. Fulks ◽

J. Rahn ◽

J. Ho ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Laser Processing ◽

Thin Film Transistors ◽

Si Thin Film

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Effects of Grain-Boundaries in Excimer-Laser Crystallized Poly-Si Thin-Film Transistors

31st European Solid-State Device Research Conference ◽

10.1109/essderc.2001.195305 ◽

2001 ◽

Cited By ~ 2

Author(s):

R. Ishihara

Keyword(s):

Thin Film ◽

Grain Boundaries ◽

Excimer Laser ◽

Thin Film Transistors ◽

Si Thin Film

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Twin-grain Si thin-film transistors produced by single-shot irradiation of excimer-laser light

1999 57th Annual Device Research Conference Digest (Cat. No.99TH8393) ◽

10.1109/drc.1999.806334 ◽

2003 ◽

Author(s):

Chang-Ho Oh ◽

M. Matsumura

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Light ◽

Single Shot ◽

Si Thin Film

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Performance of Poly-Si Thin Film Transistors Fabricated by Excimer-Laser Annealing of SiH4- and Si2H6- Source Low Pressure Vapor Deposited a-Si Films with or without Solid-Phase Crystallization

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.37-38.565 ◽

1994 ◽

Vol 37-38 ◽

pp. 565-570 ◽

Cited By ~ 1

Author(s):

M. Fuse ◽

I. Asai ◽

M. Hirota ◽

Yoshinari Miyamoto

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Solid Phase ◽

Low Pressure ◽

Excimer Laser Annealing ◽

Solid Phase Crystallization ◽

Si Films ◽

Si Thin Film

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Application of Ion Doping and Excimer Laser Annealing to Fabrication of Low-Temperature Polycrystalline Si Thin-Film Transistors

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.2092 ◽

1994 ◽

Vol 33 (Part 1, No. 4A) ◽

pp. 2092-2099 ◽

Cited By ~ 13

Author(s):

Genshiro Kawachi ◽

Takashi Aoyama ◽

Akio Mimura ◽

Nobutake Konishi

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Laser Annealing ◽

Excimer Laser Annealing ◽

Ion Doping ◽

Si Thin Film

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Effects of Source/Drain Activation on Channel-Length for Excimer-Laser-Crystallized Poly-Si Thin-Film Transistors

Electrochemical and Solid-State Letters ◽

10.1149/1.2150167 ◽

2006 ◽

Vol 9 (2) ◽

pp. H8-H11 ◽

Cited By ~ 2

Author(s):

C.-L. Fan ◽

T.-H. Yang

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Channel Length ◽

Si Thin Film

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Excimer Laser Crystallized Poly-Si Thin-Film Transistors on a Plastic Substrate with Mobility of 250 cm2/V.s

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.80-81.169 ◽

2001 ◽

Vol 80-81 ◽

pp. 169-174 ◽

Cited By ~ 3

Author(s):

Dharam P. Gosain ◽

A. Machida ◽

S. Usui ◽

Masao Arai

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Plastic Substrate ◽

Si Thin Film

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Electrical Characteristics of Excimer-Laser-Annealed Poly-Si Thin-Film Transistors

Journal of the Korean Physical Society ◽

10.3938/jkps.51.241 ◽

2007 ◽

Vol 51 (96) ◽

pp. 241 ◽

Cited By ~ 3

Author(s):

Woo-Hyun LEE ◽

Hyun-Mo KOO ◽

Won-Ju CHO ◽

Jongwan JUNG ◽

Soon-Young OH ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Electrical Characteristics ◽

Si Thin Film

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High-Performance Poly-Si Thin-Film Transistors with Excimer-Laser Annealed Silicon-Nitride Gate

10.7567/ssdm.1992.b-1-2 ◽

1992 ◽

Author(s):

Kazuhiro Shimizu ◽

Masayuki Higashimoto ◽

Kyoutarou Nakamura ◽

Osamu Sugiura ◽

Masakiyo Matsumura

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Si Thin Film

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High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure

Electrochemical and Solid-State Letters ◽

10.1149/1.1830372 ◽

2005 ◽

Vol 8 (1) ◽

pp. G14 ◽

Cited By ~ 4

Author(s):

Ting-Kuo Chang ◽

Ching-Wei Lin ◽

Chun-Chien Tsai ◽

Jian-Hao Lu ◽

Bo-Ting Chen ◽

...

Keyword(s):

Thin Film ◽

Laser Irradiation ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Performance ◽

Excimer Laser Irradiation ◽

Si Thin Film

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High-mobility poly-Si thin-film transistors fabricated by a novel excimer laser crystallization method

IEEE Transactions on Electron Devices ◽

10.1109/16.249432 ◽

1993 ◽

Vol 40 (1) ◽

pp. 112-117 ◽

Cited By ~ 73

Author(s):

K. Shimizu ◽

O. Sugiura ◽

M. Matsumura

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

High Mobility ◽

Laser Crystallization ◽

Crystallization Method ◽

Excimer Laser Crystallization ◽

Si Thin Film

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