High-Performance Poly-Si Thin Film Transistors Crystallized by Excimer Laser Irradiation with A-Si Spacer Structure

2005 ◽  
Vol 8 (1) ◽  
pp. G14 ◽  
Author(s):  
Ting-Kuo Chang ◽  
Ching-Wei Lin ◽  
Chun-Chien Tsai ◽  
Jian-Hao Lu ◽  
Bo-Ting Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Excimer Laser Irradiation ◽  
Si Thin Film

High-Performance Poly-Si Thin-Film Transistors with Excimer-Laser Annealed Silicon-Nitride Gate

1992 ◽  
Author(s):  
Kazuhiro Shimizu ◽  
Masayuki Higashimoto ◽  
Kyoutarou Nakamura ◽  
Osamu Sugiura ◽  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Si Thin Film

Fabrication method for self-aligned bottom-gate oxide thin-film transistors by utilizing backside excimer-laser irradiation through substrate

2013 ◽  
Vol 103 (14) ◽  
pp. 142111 ◽  
Author(s):  
Mitsuru Nakata ◽  
Hiroshi Tsuji ◽  
Yoshihide Fujisaki ◽  
Hiroto Sato ◽  
Yoshiki Nakajima ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Gate Oxide ◽  
Oxide Thin Film ◽  
Fabrication Method ◽  
Excimer Laser Irradiation ◽  
Bottom Gate

High-Performance Poly-Si Thin-Film Transistors with Excimer-Laser Annealed Silicon-Nitride Gate

1993 ◽  
Vol 32 (Part 1, No. 1B) ◽  
pp. 452-457 ◽  
Author(s):  
Kazuhiro Shimizu ◽  
Kyoutarou Nakamura ◽  
Masayuki Higashimoto ◽  
Osamu Sugiura ◽  
Masakiyo Matsumura
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
High Performance ◽  
Si Thin Film
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