Metalorganic chemical vapor deposition of barium strontium titanate thin films with a more coordinatively saturated Ti precursor, Ti(dmae)4(dmae=dimethylaminoethoxide)

Jung-Hyun Lee; Joo-Young Kim; Jae-Young Shim; Shi-Woo Rhee

doi:10.1116/1.582001

Metalorganic chemical vapor deposition of barium strontium titanate thin films with a more coordinatively saturated Ti precursor, Ti(dmae)4(dmae=dimethylaminoethoxide)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582001 ◽

1999 ◽

Vol 17 (5) ◽

pp. 3033-3037 ◽

Cited By ~ 15

Author(s):

Jung-Hyun Lee ◽

Joo-Young Kim ◽

Jae-Young Shim ◽

Shi-Woo Rhee

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Barium Strontium ◽

Metalorganic Chemical

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Film Precursor Formation in Metalorganic Chemical Vapor Deposition of Barium Strontium Titanate Films: A Study by Microdischarge Optical Emission Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.778 ◽

2002 ◽

Vol 41 (Part 1, No. 2A) ◽

pp. 778-783 ◽

Cited By ~ 8

Author(s):

Shun Momose ◽

Toshihiro Nakamura ◽

Kunihide Tachibana

Keyword(s):

Chemical Vapor Deposition ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Emission Spectroscopy ◽

Metalorganic Chemical Vapor Deposition ◽

Optical Emission Spectroscopy ◽

Chemical Vapor ◽

Optical Emission ◽

Barium Strontium ◽

Metalorganic Chemical

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Chemical Vapor Deposition of Barium Strontium Titanate Thin Films by the Direct Liquid Injection of Ba(methd)[sub 2], Sr(methd)[sub 2], and Ti(mpd)(tmhd)[sub 2] Without Solvent

Electrochemical and Solid-State Letters ◽

10.1149/1.1390886 ◽

1999 ◽

Vol 2 (10) ◽

pp. 510 ◽

Cited By ~ 6

Author(s):

Jung-Hyun Lee

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Barium Strontium ◽

Liquid Injection ◽

Direct Liquid Injection

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Preparation of Barium Strontium Titanate Thin Films by Liquid Source Chemical Vapor Deposition.

Shinku ◽

10.3131/jvsj.42.368 ◽

1999 ◽

Vol 42 (3) ◽

pp. 368-371

Author(s):

Yutaka TAKESHIMA ◽

Katsuhiko TANAKA ◽

Yukio SAKABE

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Barium Strontium ◽

Liquid Source

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Composition Control of Barium Strontium Titanate Thin Films Prepared by Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4487 ◽

1998 ◽

Vol 37 (Part 1, No. 8) ◽

pp. 4487-4492 ◽

Cited By ~ 3

Author(s):

Masahiro Kiyotoshi ◽

Kazuhiro Eguchi ◽

Keitaro Imai ◽

Tsunetoshi Arikado

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Strontium Titanate ◽

Barium Strontium Titanate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Composition Control ◽

Barium Strontium

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Effect of Substrates and Thermal Treatments on Metalorganic Chemical Vapor Deposition-Grown Sb2Te3 Thin Films

Crystal Growth & Design ◽

10.1021/acs.cgd.1c00508 ◽

2021 ◽

Author(s):

Martino Rimoldi ◽

Raimondo Cecchini ◽

Claudia Wiemer ◽

Emanuele Longo ◽

Stefano Cecchi ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Thermal Treatments ◽

Metalorganic Chemical

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Fabrication of aluminum oxide thin films by a low‐pressure metalorganic chemical vapor deposition technique

Applied Physics Letters ◽

10.1063/1.108838 ◽

1993 ◽

Vol 62 (7) ◽

pp. 681-683 ◽

Cited By ~ 34

Author(s):

J. S. Kim ◽

H. A. Marzouk ◽

P. J. Reucroft ◽

J. D. Robertson ◽

C. E. Hamrin

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Aluminum Oxide ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique ◽

Metalorganic Chemical

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Low-pressure Metalorganic Chemical Vapor Deposition and Characterization of YBa2Cu3O7−x Thin Films

Superconductivity and Applications ◽

10.1007/978-1-4684-7565-4_11 ◽

1990 ◽

pp. 127-138

Author(s):

P. Zawadzki ◽

G. S. Tompa ◽

P. Norris ◽

D. W. Noh ◽

B. Gallois ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Metalorganic Chemical

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Epitaxial thin films of YBa2Cu3O7−xon LaAlO3substrates deposited by plasma‐enhanced metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104973 ◽

1991 ◽

Vol 58 (2) ◽

pp. 185-187 ◽

Cited By ~ 36

Author(s):

C. S. Chern ◽

J. Zhao ◽

Y. Q. Li ◽

P. Norris ◽

B. Kear ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Thin Films ◽

Metalorganic Chemical

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Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films

Journal of Applied Physics ◽

10.1063/1.373005 ◽

2000 ◽

Vol 87 (10) ◽

pp. 7430-7437 ◽

Cited By ~ 13

Author(s):

Y. Gao ◽

C. L. Perkins ◽

S. He ◽

P. Alluri ◽

T. Tran ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Mechanistic Study ◽

Metalorganic Chemical

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Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

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