scholarly journals Preparation of Barium Strontium Titanate Thin Films by Liquid Source Chemical Vapor Deposition.

Shinku ◽  
1999 ◽  
Vol 42 (3) ◽  
pp. 368-371
Author(s):  
Yutaka TAKESHIMA ◽  
Katsuhiko TANAKA ◽  
Yukio SAKABE
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Barium Strontium ◽  
Liquid Source

Composition Control of Barium Strontium Titanate Thin Films Prepared by Chemical Vapor Deposition

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4487-4492 ◽  
Author(s):  
Masahiro Kiyotoshi ◽  
Kazuhiro Eguchi ◽  
Keitaro Imai ◽  
Tsunetoshi Arikado
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Composition Control ◽  
Barium Strontium

In situ single-liquid-source metal-organic chemical vapor deposition of (La0.8Ca0.2)MnO3 giant magnetoresistive films

1995 ◽  
Vol 10 (9) ◽  
pp. 2166-2169 ◽  
Author(s):  
Y.Q. Li ◽  
J. Zhang ◽  
S. Pombrik ◽  
S. DiMascio ◽  
W. Stevens ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Organic Solution ◽  
Liquid Source ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

A large magnetoresistance change (ΔR/RH) of −550% has been observed at 270 K in (La0.8Ca0.2)MnO3 thin films. The films were prepared in situ on LaAlO3 substrates by single-liquid-source metal-organic chemical vapor deposition. M(thd)n (M = La, Ca, and Mn, and n = 2, 3) were dissolved together in an organic solution and used as precursors for the deposition of (La0.8Ca0.2)MnO3 thin films. Deposition was conducted at an oxygen partial pressure of 1.2 Torr and a substrate temperature ranging from 600 °C to 700 °C. The mechanism for the large magnetoresistance change in this manganese oxide is briefly discussed.

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