Etching of diamond (100) surface by atomic hydrogen: Real-time observation by reflection high energy electron diffraction

Shojiro Komatsu; Katsuyuki Okada; Sung-Baek Chou; Takashi Aizawa; Hisashi Shigetani; Junzo Tanaka; Yoichiro Sato

doi:10.1116/1.581479

Etching of diamond (100) surface by atomic hydrogen: Real-time observation by reflection high energy electron diffraction

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581479 ◽

1998 ◽

Vol 16 (2) ◽

pp. 749-753 ◽

Cited By ~ 5

Author(s):

Shojiro Komatsu ◽

Katsuyuki Okada ◽

Sung-Baek Chou ◽

Takashi Aizawa ◽

Hisashi Shigetani ◽

...

Keyword(s):

Electron Diffraction ◽

Real Time ◽

Atomic Hydrogen ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Time Observation ◽

Real Time Observation

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Real-time observation of initial stages of copper film growth on silicon oxide using reflection high-energy electron diffraction

Journal of Applied Physics ◽

10.1063/1.1811785 ◽

2004 ◽

Vol 96 (12) ◽

pp. 7071-7079 ◽

Cited By ~ 28

Author(s):

Jason T. Drotar ◽

T.-M. Lu ◽

G.-C. Wang

Keyword(s):

Electron Diffraction ◽

Real Time ◽

Silicon Oxide ◽

Film Growth ◽

Copper Film ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Time Observation ◽

Real Time Observation

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Real-Time Observation of GaAs(001) Surfaces During Molecular Beam Epitaxy by Scanning Microprobe Reflection High Energy Electron Diffraction

Japanese Journal of Applied Physics ◽

10.1143/jjap.27.l2259 ◽

1988 ◽

Vol 27 (Part 2, No. 12) ◽

pp. L2259-L2261 ◽

Cited By ~ 31

Author(s):

Toshiro Isu ◽

Akiyoshi Watanabe ◽

Masayuki Hata ◽

Yoshifumi Katayama

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Real Time ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Time Observation ◽

Real Time Observation

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Real‐time observation of molecular beam epitaxy growth on mesa‐etched GaAs substrates by scanning microprobe reflection high‐energy electron diffraction

Applied Physics Letters ◽

10.1063/1.102881 ◽

1990 ◽

Vol 56 (25) ◽

pp. 2542-2544 ◽

Cited By ~ 66

Author(s):

M. Hata ◽

T. Isu ◽

A. Watanabe ◽

Y. Katayama

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Real Time ◽

Molecular Beam ◽

High Energy ◽

Molecular Beam Epitaxy Growth ◽

High Energy Electron ◽

Gaas Substrates ◽

Time Observation ◽

Real Time Observation

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Spectroscopies combined with reflection high-energy electron diffraction (RHEED) for real-time in situ surface monitoring of thin film growth

In Situ Characterization of Thin Film Growth ◽

10.1533/9780857094957.3.180 ◽

2011 ◽

pp. 180-211 ◽

Cited By ~ 1

Author(s):

P.G. Staib

Keyword(s):

Thin Film ◽

Electron Diffraction ◽

Real Time ◽

Film Growth ◽

High Energy ◽

Thin Film Growth ◽

Energy Electron ◽

High Energy Electron ◽

Surface Monitoring

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Atomic hydrogen-cleaned GaAs(100) negative electron affinity photocathode: Surface studies with reflection high-energy electron diffraction and quantum efficiency

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582281 ◽

2000 ◽

Vol 18 (3) ◽

pp. 951-955 ◽

Cited By ~ 4

Author(s):

K. A. Elamrawi ◽

M. A. Hafez ◽

H. E. Elsayed-Ali

Keyword(s):

Electron Diffraction ◽

Quantum Efficiency ◽

Electron Affinity ◽

Atomic Hydrogen ◽

High Energy ◽

Energy Electron ◽

Negative Electron Affinity ◽

High Energy Electron ◽

Surface Studies

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Real-time scanning microprobe reflection high-energy electron diffraction observations of the cleaning process of GaAs substrates

Journal of Crystal Growth ◽

10.1016/0022-0248(95)80191-e ◽

1995 ◽

Vol 150 ◽

pp. 110-116 ◽

Cited By ~ 6

Author(s):

Y. Morishita ◽

S. Goto ◽

Y. Nomura ◽

T. Isu ◽

Y. Katayama

Keyword(s):

Electron Diffraction ◽

Real Time ◽

High Energy ◽

Energy Electron ◽

Cleaning Process ◽

High Energy Electron ◽

Gaas Substrates ◽

Time Scanning

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Reflection high-energy electron diffraction real-time monitoring of an etch process implemented in molecular beam epitaxy technology: hydrogen chloride versus GaAs(001) epilayers

Applied Physics A ◽

10.1007/s003390050784 ◽

1998 ◽

Vol 67 (3) ◽

pp. 357-359

Author(s):

A. Hamoudi ◽

T. Sogawa ◽

T. Saitoh ◽

J. Yumoto

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Real Time ◽

Hydrogen Chloride ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Real Time Monitoring

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Real-time algorithm to determine the period and phase of Reflection High-Energy Electron Diffraction (RHEED) intensity oscillations during epitaxial growth

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2016.10.010 ◽

2017 ◽

Vol 477 ◽

pp. 50-53 ◽

Cited By ~ 1

Author(s):

Wolfgang Braun

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Real Time ◽

Time Algorithm ◽

High Energy ◽

Energy Electron ◽

High Energy Electron

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Atomic hydrogen beam etching of carbon superstructures on 6H-SiC (0001) studied by reflection high-energy electron diffraction

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00398-8 ◽

2001 ◽

Vol 10 (3-7) ◽

pp. 1218-1223 ◽

Cited By ~ 9

Author(s):

Xian Ning Xie ◽

Roderick Lim ◽

Jun Li ◽

Sam F.Y Lin ◽

Kian Ping Loh

Keyword(s):

Electron Diffraction ◽

Atomic Hydrogen ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Hydrogen Beam

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Real time analysis of self-assembled InAs/GaAs quantum dot growth by probing reflection high-energy electron diffraction chevron image

Journal of Applied Physics ◽

10.1063/1.2987469 ◽

2008 ◽

Vol 104 (7) ◽

pp. 074305 ◽

Cited By ~ 17

Author(s):

Takuya Kudo ◽

Tomoya Inoue ◽

Takashi Kita ◽

Osamu Wada

Keyword(s):

Electron Diffraction ◽

Quantum Dot ◽

Real Time ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Time Analysis ◽

Real Time Analysis ◽

Self Assembled ◽

Gaas Quantum Dot

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