Comparison of Si/SiO2 interface roughness from electron cyclotron resonance plasma and thermal oxidation

1998 ◽  
Vol 16 (1) ◽  
pp. 57-62 ◽  
Author(s):  
C. Zhao ◽  
Y. Z. Hu ◽  
T. Labayen ◽  
L. Lai ◽  
E. A. Irene
Keyword(s):  
Thermal Oxidation ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Interface Roughness ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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