Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin-Film Transistors

1996 ◽  
Vol 35 (Part 1, No. 2B) ◽  
pp. 930-933
Author(s):  
Jung-In Han ◽  
Choong-Ki Kim ◽  
Chul-Hi Han
Keyword(s):  
Thin Film ◽  
Thermal Oxidation ◽  
Cyclotron Resonance ◽  
Thin Film Transistors ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma ◽  
Bottom Gate

Hydrogen Passivation of Polysilicon Thin-Film Transistors by Electron Cyclotron Resonance Plasma

1993 ◽  
Vol 32 (Part 1, No. 6A) ◽  
pp. 2601-2606 ◽  
Author(s):  
Kris Baert ◽  
Hiroyuki Murai ◽  
Kazuhiro Kobayashi ◽  
Hirofumi Namizaki ◽  
Masahiro Nunoshita
Keyword(s):  
Thin Film ◽  
Cyclotron Resonance ◽  
Thin Film Transistors ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Hydrogen Passivation ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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