Rumpled relaxation of TiC(001) and TaC(001) determined by high-resolution medium-energy ion scattering spectroscopy

2000 ◽  
Vol 61 (3) ◽  
pp. 1748-1751 ◽  
Author(s):  
Yoshiaki Kido ◽  
Tomoaki Nishimura ◽  
Yasushi Hoshino ◽  
Shigeki Otani ◽  
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Keyword(s):  
High Resolution ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Traceable thickness measurement of ultra-thin HfO2 films by medium-energy ion scattering spectroscopy

Metrologia ◽  
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Kyung Joong Kim ◽  
Tae Gun Kim ◽  
Ji-Hwan Kwon ◽  
Hyun Ruh ◽  
Kyungsu Park ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy

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Vol 118 (13) ◽  
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Author(s):  
Won Ja Min ◽  
Kyungsu Park ◽  
Kyu-Sang Yu ◽  
Sungjung Joo ◽  
Yong-Sung Kim ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering
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