In situ electron cyclotron resonance plasma surface cleaning of silicon

1994 ◽  
Vol 12 (4) ◽  
pp. 1315-1321 ◽  
Author(s):  
Y. Z. Hu ◽  
P. P. Buaud ◽  
L. Spanos ◽  
Y. Q. Wang ◽  
M. Li ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Surface Cleaning ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Surface ◽  
Resonance Plasma

Characterization and in situ monitoring of a novel compact electron cyclotron resonance plasma source

1995 ◽  
Vol 66 (11) ◽  
pp. 5252-5256 ◽  
Author(s):  
Patrick O’Keeffe ◽  
C. O’Morain ◽  
S. Den ◽  
Y. Hayashi ◽  
S. Komuro ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
In Situ Monitoring ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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