Growth ripples upon strained SiGe epitaxial layers on Si and misfit dislocation interactions

1994 ◽  
Vol 12 (4) ◽  
pp. 1924-1931 ◽  
Author(s):  
A. G. Cullis ◽  
D. J. Robbins ◽  
S. J. Barnett ◽  
A. J. Pidduck
1996 ◽  
Vol 89 (3) ◽  
pp. 341-346 ◽  
Author(s):  
W. Wierzchowski ◽  
K. Mazur ◽  
Wł. Strupiński ◽  
K. Wieteska ◽  
W. Graeff

2016 ◽  
Vol 22 (S3) ◽  
pp. 1506-1507
Author(s):  
Everett D. Grimley ◽  
Edward Sachet ◽  
Brian F. Donovan ◽  
Patrick E. Hopkins ◽  
Jon-Paul Maria ◽  
...  

2011 ◽  
Vol 50 (11) ◽  
pp. 3162-3170 ◽  
Author(s):  
Junwan Li ◽  
Huaibao Lu ◽  
Yushan Ni ◽  
Jifa Mei

1993 ◽  
Vol 74 (5) ◽  
pp. 3103-3110 ◽  
Author(s):  
G. Patrick Watson ◽  
Dieter G. Ast ◽  
Timothy J. Anderson ◽  
Balu Pathangey

1992 ◽  
Vol 263 ◽  
Author(s):  
Michael A. Capano

ABSTRACTA new mechanism which describes how misfit dislocations in epitaxial layers multiply is presented. This work demonstrates how a single threading dislocation can give rise to an array of dislocation sources, where each source generates a single dislocation loop perpendicular to the primary misfit dislocation. As a threading dislocation with pure screw character glides through an epilayer, certain processes occur which lead to the production of a single dislocation half-loop, and the regeneration of the original threading dislocation. The regenerated threading dislocation continues to propagate on its primary glide plane, which allows the process to repeat itself at some later time. The result of this sequential process is an array of half-loops perpendicular to the primary misfit dislocation. The shape and symmetry of the arrays also contains information regarding how the mechanism operates. The proposed mechanism is related to misfit dislocation arrays in a single Si0.87Ge0.13 layer on Si(001).


1998 ◽  
Vol 83 (7) ◽  
pp. 3773-3776 ◽  
Author(s):  
G. P. Watson ◽  
J. L. Benton ◽  
Y. H. Xie ◽  
E. A. Fitzgerald

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