In situ thin film thickness measurement with acoustic Lamb waves

Jun Pei; F. Levent Degertekin; Butrus T. Khuri‐Yakub; Krishna C. Saraswat

doi:10.1063/1.113938

In situ thin film thickness measurement with acoustic Lamb waves

Applied Physics Letters ◽

10.1063/1.113938 ◽

1995 ◽

Vol 66 (17) ◽

pp. 2177-2179 ◽

Cited By ~ 24

Author(s):

Jun Pei ◽

F. Levent Degertekin ◽

Butrus T. Khuri‐Yakub ◽

Krishna C. Saraswat

Keyword(s):

Thin Film ◽

Film Thickness ◽

Lamb Waves ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Thin film thickness measurement using harmonic antisymmetric lamb waves

Izmeritel`naya Tekhnika ◽

10.32446/0368-1025it-2018-6-70-72 ◽

2018 ◽

pp. 70-72

Author(s):

H. B. TOLIPOV

Keyword(s):

Thin Film ◽

Film Thickness ◽

Lamb Waves ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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In situ thin film thickness measurement using ultrasonics waves

Proceedings of IEEE Ultrasonics Symposium ULTSYM-94 ◽

10.1109/ultsym.1994.401809 ◽

1994 ◽

Cited By ~ 3

Author(s):

Pei ◽

Degertekin ◽

Honein ◽

Khuri-Yakub ◽

Saraswat

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Multilayer thin film thickness measurement using sensitivity separation method

Optics Communications ◽

10.1016/j.optcom.2010.05.054 ◽

2010 ◽

Vol 283 (20) ◽

pp. 3989-3993 ◽

Cited By ~ 3

Author(s):

Xing-zhi Gong ◽

Liang Cheng ◽

Fei-hong Yu

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Separation Method ◽

Multilayer Thin Film ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Spectroscopic thin film thickness measurement system for semiconductor industries

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) ◽

10.1109/imtc.1994.352008 ◽

2002 ◽

Cited By ~ 2

Author(s):

M. Horie ◽

N. Fujiwara ◽

M. Kokubo ◽

N. Kondo

Keyword(s):

Thin Film ◽

Film Thickness ◽

Measurement System ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement ◽

Thickness Measurement System

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Novel wide-angle ellipsometric arrangement for thin film thickness measurement

Journal of Physics Communications ◽

10.1088/2399-6528/aac084 ◽

2018 ◽

Vol 2 (5) ◽

pp. 055007

Author(s):

A W Abdallah ◽

R Tutsch ◽

N N Nagib

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Wide Angle ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Processing technology of interferogram for thin film thickness measurement

10.1117/12.837583 ◽

2009 ◽

Author(s):

Jun-hong Su ◽

Jin-man Ge

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Processing Technology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Combined thin-film thickness measurement and surface metrology of photovoltaic thin films using Coherence Correlation Interferometry

2012 38th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2012.6317648 ◽

2012 ◽

Author(s):

Biancamaria Maniscalco ◽

Piotr M. Kaminski ◽

John M. Walls

Keyword(s):

Thin Film ◽

Thin Films ◽

Film Thickness ◽

Thickness Measurement ◽

Surface Metrology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Application of optical spectral interferometry for thin film thickness measurement

2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) ◽

10.1109/msmw.2016.7538130 ◽

2016 ◽

Author(s):

Konstantin A. Lukin ◽

Dmytro N. Tatyanko ◽

Alona B. Pikh

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Spectral Interferometry ◽

Film Thickness Measurement

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A method of measuring small frequency change and its application to two methods of thin film thickness measurement

Journal of Physics E Scientific Instruments ◽

10.1088/0022-3735/2/1/436 ◽

1969 ◽

Vol 2 (1) ◽

pp. 111-112

Author(s):

J S Osborn

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Frequency Change ◽

Small Frequency ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Thin film thickness measurement using silver-modified Newton's ring

Vacuum ◽

10.1016/0042-207x(63)91089-3 ◽

1963 ◽

Vol 13 (8) ◽

pp. 324

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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