In-situ film thickness measurements for real-time monitoring and control of advanced photoresist track coating systems

Mapping Intimacies ◽

10.1117/12.56629 ◽

1992 ◽

Cited By ~ 7

Author(s):

Thomas E. Metz ◽

Richard N. Savage ◽

Horace O. Simmons

Keyword(s):

Film Thickness ◽

Real Time ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control ◽

Thickness Measurements

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In-Situ Real Time Monitoring and Control of Mold Making and Filling Processes: Final Report

10.2172/1000511 ◽

2010 ◽

Author(s):

Mohamed Abdelrahman ◽

Kenneth Currie

Keyword(s):

Real Time ◽

Final Report ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Mold Making ◽

And Control

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Real-time monitoring and control of epitaxial semiconductor growth in a production environment by in situ spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/s0040-6090(97)00870-5 ◽

1998 ◽

Vol 313-314 ◽

pp. 490-495 ◽

Cited By ~ 33

Author(s):

B Johs ◽

C Herzinger ◽

J.H Dinan ◽

A Cornfeld ◽

J.D Benson ◽

...

Keyword(s):

Real Time ◽

Spectroscopic Ellipsometry ◽

Monitoring And Control ◽

Production Environment ◽

Real Time Monitoring ◽

And Control

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Real-time monitoring and control of CHO cell apoptosis by in situ multifrequency scanning dielectric spectroscopy

Process Biochemistry ◽

10.1016/j.procbio.2019.02.017 ◽

2019 ◽

Vol 80 ◽

pp. 138-145 ◽

Cited By ~ 2

Author(s):

Fuduo Ma ◽

An Zhang ◽

David Chang ◽

Orlin D. Velev ◽

Kelly Wiltberger ◽

...

Keyword(s):

Real Time ◽

Dielectric Spectroscopy ◽

Cell Apoptosis ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Cho Cell ◽

And Control

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Real‐time in situ epitaxial film thickness monitoring and control using an emission Fourier transform infrared spectrometer

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578986 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1938-1942 ◽

Cited By ~ 2

Author(s):

Z. H. Zhou ◽

I. Yang ◽

H. Kim ◽

F. Yu ◽

Rafael Reif

Keyword(s):

Fourier Transform ◽

Film Thickness ◽

Real Time ◽

Epitaxial Film ◽

Fourier Transform Infrared ◽

Monitoring And Control ◽

Fourier Transform Infrared Spectrometer ◽

Infrared Spectrometer ◽

And Control

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Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. II. Real-time in situ process monitoring and control

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.401011 ◽

1995 ◽

Vol 8 (3) ◽

pp. 340-345 ◽

Cited By ~ 2

Author(s):

Zhen-Hong Zhou ◽

R. Reif

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Film Thickness ◽

Fourier Transform Infrared Spectroscopy ◽

Process Monitoring ◽

Monitoring And Control ◽

Process Monitoring And Control ◽

And Control ◽

Thickness Measurements

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Implementation of 802.15.4 Wireless Sensor Network in Real-time Monitoring and Control System for Green House

International Journal of Urban Design for Ubiquitous Computing ◽

10.21742/ijuduc.2015.3.2.02 ◽

2015 ◽

Vol 3 (2) ◽

pp. 9-22

Author(s):

Jaypal Baviskar ◽

◽

Afshan Mulla ◽

Amol Baviskar ◽

Jeet Desai ◽

...

Keyword(s):

Control System ◽

Wireless Sensor Network ◽

Real Time ◽

Sensor Network ◽

Wireless Sensor ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Monitoring And Control System ◽

Green House ◽

And Control

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Real-time monitoring and control of porosity defects during arc welding of aluminum alloys

Journal of Materials Processing Technology ◽

10.1016/j.jmatprotec.2020.116832 ◽

2020 ◽

Vol 286 ◽

pp. 116832

Author(s):

Yiming Huang ◽

Yuxue Yuan ◽

Lijun Yang ◽

Di Wu ◽

Shanben Chen

Keyword(s):

Aluminum Alloys ◽

Real Time ◽

Arc Welding ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Porosity Defects ◽

And Control

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A Microcomputer System for Real-Time Monitoring and Control of Gas Chromatographs

Journal of Chromatographic Science ◽

10.1093/chromsci/14.6.274 ◽

1976 ◽

Vol 14 (6) ◽

pp. 274-278 ◽

Cited By ~ 1

Author(s):

L. F. Donaghey ◽

G. M. Bobba ◽

D. Jacobs

Keyword(s):

Real Time ◽

Microcomputer System ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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A Real-time Monitoring and Control System for Crop

Proceedings of the 2019 2nd International Conference on Algorithms, Computing and Artificial Intelligence ◽

10.1145/3377713.3377742 ◽

2019 ◽

Author(s):

Tianyu Feng ◽

Yueting Chai ◽

Yadong Huang ◽

Yi Liu

Keyword(s):

Control System ◽

Real Time ◽

Monitoring And Control ◽

Real Time Monitoring ◽

Monitoring And Control System ◽

And Control

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Real Time Monitoring and Control of a Hybrid Bicycle - A Sliding Mode Approach

2018 15th International Workshop on Variable Structure Systems (VSS) ◽

10.1109/vss.2018.8460373 ◽

2018 ◽

Author(s):

Sumesh Sankar ◽

P. S Lal Priya ◽

S. Indulal

Keyword(s):

Real Time ◽

Sliding Mode ◽

Monitoring And Control ◽

Real Time Monitoring ◽

And Control

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