Quantification of microstructural evolution in sputtered a‐Si thin films by real time spectroscopic ellipsometry

1991 ◽  
Vol 9 (3) ◽  
pp. 632-637 ◽  
Author(s):  
Ilsin An ◽  
H. V. Nguyen ◽  
N. V. Nguyen ◽  
R. W. Collins
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Microstructural Evolution ◽  
Spectroscopic Ellipsometry

Optical gradients in a-Si:H thin films detected using real-time spectroscopic ellipsometry with virtual interface analysis

2018 ◽  
Vol 436 ◽  
pp. 779-784
Author(s):  
Maxwell M. Junda ◽  
Laxmi Karki Gautam ◽  
Robert W. Collins ◽  
Nikolas J. Podraza
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Virtual Interface ◽  
Interface Analysis

Hot-wire deposition of a-Si:H thin films on wafer substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy

2008 ◽  
Vol 516 (5) ◽  
pp. 511-516 ◽  
Author(s):  
P.J. van den Oever ◽  
J.J.H. Gielis ◽  
M.C.M. van de Sanden ◽  
W.M.M. Kessels
Keyword(s):  
Thin Films ◽  
Infrared Spectroscopy ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Hot Wire

scholarly journals Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth

2012 ◽  
Vol 61 (3) ◽  
pp. 036802
Author(s):  
Li Xin-Li ◽  
Gu Jin-Hua ◽  
Gao Hai-Bo ◽  
Chen Yong-Sheng ◽  
Gao Xiao-Yong ◽  
...  
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Ex Situ ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Hydrogen diffusion and reaction processes in thin films investigated by real time spectroscopic ellipsometry

1993 ◽  
Vol 233 (1-2) ◽  
pp. 276-280 ◽  
Author(s):  
Ilsin An ◽  
R.W. Collins ◽  
Hien V. Nguyen ◽  
K. Vedam ◽  
H.S. Witham ◽  
...  
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Hydrogen Diffusion ◽  
Reaction Processes
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