Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth

Li Xin-Li;  Gu Jin-Hua;  Gao Hai-Bo;  Chen Yong-Sheng;  Gao Xiao-Yong;  Yang Shi-E;  Lu Jing-Xiao;  Li Rui;  Jiao Yue-Chao

doi:10.7498/aps.61.036802

Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth

Acta Physica Sinica ◽

10.7498/aps.61.036802 ◽

2012 ◽

Vol 61 (3) ◽

pp. 036802

Author(s):

Li Xin-Li ◽

Gu Jin-Hua ◽

Gao Hai-Bo ◽

Chen Yong-Sheng ◽

Gao Xiao-Yong ◽

...

Keyword(s):

Thin Films ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Ex Situ ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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The microstructure and optical properties of p-type microcrystalline silicon thin films characterized by ex-situ spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/j.tsf.2012.03.081 ◽

2012 ◽

Vol 521 ◽

pp. 17-21 ◽

Cited By ~ 7

Author(s):

He Zhang ◽

Xiaodan Zhang ◽

Guofu Hou ◽

Changchun Wei ◽

Jian Sun ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Spectroscopic Ellipsometry ◽

Ex Situ ◽

Microcrystalline Silicon ◽

Silicon Thin Films ◽

P Type

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Analysis of controlled mixed-phase (amorphous+microcrystalline) silicon thin films by real time spectroscopic ellipsometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3212893 ◽

2009 ◽

Vol 27 (6) ◽

pp. 1255-1259 ◽

Cited By ~ 14

Author(s):

N. J. Podraza ◽

Jing Li ◽

C. R. Wronski ◽

E. C. Dickey ◽

R. W. Collins

Keyword(s):

Thin Films ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Mixed Phase ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment

Physical Review B ◽

10.1103/physrevb.52.5136 ◽

1995 ◽

Vol 52 (7) ◽

pp. 5136-5143 ◽

Cited By ~ 117

Author(s):

N. Layadi ◽

P. Roca i Cabarrocas ◽

B. Drévillon ◽

I. Solomon

Keyword(s):

Thin Films ◽

Plasma Treatment ◽

Real Time ◽

Spectroscopic Ellipsometry ◽

Hydrogen Plasma ◽

Microcrystalline Silicon ◽

Silicon Deposition ◽

Silicon Thin Films

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Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films

Physical Review B ◽

10.1103/physrevb.63.115306 ◽

2001 ◽

Vol 63 (11) ◽

Cited By ~ 114

Author(s):

Hiroyuki Fujiwara ◽

Michio Kondo ◽

Akihisa Matsuda

Keyword(s):

Thin Films ◽

Real Time ◽

Grain Growth ◽

Spectroscopic Ellipsometry ◽

Microcrystalline Silicon ◽

Growth Processes ◽

Silicon Thin Films

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Study by real time ellipsometry of the growth of amorphous and microcrystalline silicon thin films combining glow discharge decomposition and UV light irradiation

Thin Solid Films ◽

10.1016/0040-6090(93)90108-2 ◽

1993 ◽

Vol 233 (1-2) ◽

pp. 281-285 ◽

Cited By ~ 12

Author(s):

N. Layadi ◽

P. Roca i Cabarrocas ◽

V. Yakovlev ◽

B. Drévillon

Keyword(s):

Thin Films ◽

Glow Discharge ◽

Real Time ◽

Uv Light ◽

Light Irradiation ◽

Microcrystalline Silicon ◽

Silicon Thin Films ◽

Uv Light Irradiation

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Microcrystalline silicon thin films studied using spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.1499980 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2467-2474 ◽

Cited By ~ 47

Author(s):

T. D. Kang ◽

Hosun Lee ◽

S. J. Park ◽

J. Jang ◽

Soonil Lee

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Electron-impact silane dissociation and deposition rate relationship in the PECVD of microcrystalline silicon thin films

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2001390 ◽

2001 ◽

Vol 11 (PR3) ◽

pp. Pr3-715-Pr3-722 ◽

Cited By ~ 1

Author(s):

E. Amanatides ◽

D. E. Rapakoulias ◽

D. Mataras

Keyword(s):

Thin Films ◽

Electron Impact ◽

Deposition Rate ◽

Microcrystalline Silicon ◽

Silicon Thin Films ◽

Rate Relationship

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Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films

The European Physical Journal Applied Physics ◽

10.1051/epjap:2006094 ◽

2006 ◽

Vol 35 (3) ◽

pp. 165-172 ◽

Cited By ~ 12

Author(s):

A. Fontcuberta i Morral ◽

P. Roca i Cabarrocas

Keyword(s):

Thin Films ◽

Hydrogen Diffusion ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2012.01.014 ◽

2012 ◽

Vol 358 (17) ◽

pp. 1974-1977 ◽

Cited By ~ 33

Author(s):

E.V. Johnson ◽

S. Pouliquen ◽

P.A. Delattre ◽

J.P. Booth

Keyword(s):

Thin Films ◽

Ion Bombardment ◽

Microcrystalline Silicon ◽

Voltage Waveform ◽

Silicon Thin Films ◽

Bombardment Energy

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Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.4807404 ◽

2013 ◽

Vol 113 (20) ◽

pp. 203505 ◽

Cited By ~ 5

Author(s):

Y. N. Guo ◽

D. Y. Wei ◽

S. Q. Xiao ◽

S. Y. Huang ◽

H. P. Zhou ◽

...

Keyword(s):

Thin Films ◽

Inductively Coupled Plasma ◽

Microcrystalline Silicon ◽

Inductively Coupled ◽

Silicon Thin Films

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