The influence of low‐energy particle–surface interactions on the initial stages of thin film formation

1991 ◽  
Vol 9 (3) ◽  
pp. 759-767 ◽  
Author(s):  
C. A. Stone ◽  
N. M. Ghoniem
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Particle Surface ◽  
Surface Interactions ◽  
Low Energy ◽  
Energy Particle ◽  
Thin Film Formation

Extraction of low-energy negative oxygen ions for thin film formation

2011 ◽  
Author(s):  
M. Vasquez ◽  
D. Sasaki ◽  
T. Kasuya ◽  
S. Maeno ◽  
M. Wada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Low Energy ◽  
Oxygen Ions ◽  
Thin Film Formation

Inelastic Phenomena of Low-Energy Particle-Surface Interactions

1996 ◽  
pp. 172-192
Author(s):  
A. Närmann ◽  
C. Höfner ◽  
T. Schlathölter ◽  
W. Heiland
Keyword(s):  
Particle Surface ◽  
Surface Interactions ◽  
Low Energy ◽  
Energy Particle

Relation of initial thin film formation to defects induced by low energy ions

1998 ◽  
Vol 336 (1-2) ◽  
pp. 42-48 ◽  
Author(s):  
H.-A. Durand ◽  
K. Sekine ◽  
K. Etoh ◽  
K. Ito ◽  
I. Kataoka
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Low Energy ◽  
Thin Film Formation ◽  
Low Energy Ions

Application of low energy negative and positive ion beams to thin film formation

1996 ◽  
Author(s):  
Y. Horino ◽  
N. Tsubouchi ◽  
B. Enders ◽  
K. Fujii ◽  
K. Yamashita ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beams ◽  
Low Energy ◽  
Thin Film Formation ◽  
Positive Ion

scholarly journals Growth of Gaseous Macromolecules in the Downstream Region of Perfluorocompounds Plasmas-Observation, Reaction Mechanism, Thin Film Formation-

Shinku ◽  
2006 ◽  
Vol 49 (3) ◽  
pp. 195-197
Author(s):  
Kenji FURUYA ◽  
Shinobu YUKITA ◽  
Hiroshi OKUMURA ◽  
Ryoichi NAKANISHI ◽  
Makoto MAKITA ◽  
...  
Keyword(s):  
Thin Film ◽  
Reaction Mechanism ◽  
Film Formation ◽  
Downstream Region ◽  
Thin Film Formation
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