Application of low energy negative and positive ion beams to thin film formation

Mapping Intimacies ◽

10.1063/1.51271 ◽

1996 ◽

Author(s):

Y. Horino ◽

N. Tsubouchi ◽

B. Enders ◽

K. Fujii ◽

K. Yamashita ◽

...

Keyword(s):

Thin Film ◽

Film Formation ◽

Ion Beams ◽

Low Energy ◽

Thin Film Formation ◽

Positive Ion

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Extraction of low-energy negative oxygen ions for thin film formation

10.1063/1.3637442 ◽

2011 ◽

Cited By ~ 1

Author(s):

M. Vasquez ◽

D. Sasaki ◽

T. Kasuya ◽

S. Maeno ◽

M. Wada ◽

...

Keyword(s):

Thin Film ◽

Film Formation ◽

Low Energy ◽

Oxygen Ions ◽

Thin Film Formation

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In situ substrate surface cleaning by low‐energy ion bombardment for high quality thin film formation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578730 ◽

1993 ◽

Vol 11 (2) ◽

pp. 307-313 ◽

Cited By ~ 18

Author(s):

Y. Aoki ◽

S. Aoyama ◽

H. Uetake ◽

K. Morizuka ◽

T. Ohmi

Keyword(s):

Thin Film ◽

Film Formation ◽

Substrate Surface ◽

Ion Bombardment ◽

Surface Cleaning ◽

Low Energy ◽

High Quality ◽

Thin Film Formation

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Thin Film Formation by Positive and Negative Ion Beams Simultaneously Irradiated Deposition.

Hyomen Kagaku ◽

10.1380/jsssj.18.775 ◽

1997 ◽

Vol 18 (12) ◽

pp. 775-779

Author(s):

Yuji HORINO

Keyword(s):

Thin Film ◽

Film Formation ◽

Ion Beams ◽

Negative Ion ◽

Thin Film Formation

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Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams

Applied Surface Science ◽

10.1016/j.apsusc.2009.05.133 ◽

2009 ◽

Vol 256 (4) ◽

pp. 1106-1109

Author(s):

T. Mashita ◽

N. Toyoda ◽

I. Yamada

Keyword(s):

Thin Film ◽

Cluster Size ◽

Size Dependence ◽

Film Formation ◽

Ion Beams ◽

Sio2 Thin Film ◽

Cluster Ion Beams ◽

Cluster Ion ◽

Thin Film Formation

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Relation of initial thin film formation to defects induced by low energy ions

Thin Solid Films ◽

10.1016/s0040-6090(98)01295-4 ◽

1998 ◽

Vol 336 (1-2) ◽

pp. 42-48 ◽

Cited By ~ 14

Author(s):

H.-A. Durand ◽

K. Sekine ◽

K. Etoh ◽

K. Ito ◽

I. Kataoka

Keyword(s):

Thin Film ◽

Film Formation ◽

Low Energy ◽

Thin Film Formation ◽

Low Energy Ions

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Thin Film Formation by Ion Beams

Journal of the Japan Society of Colour Material ◽

10.4011/shikizai1937.62.92 ◽

1989 ◽

Vol 62 (2) ◽

pp. 92-99

Author(s):

Isao YAMADA

Keyword(s):

Thin Film ◽

Film Formation ◽

Ion Beams ◽

Thin Film Formation

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MOLECULAR-DYNAMICS SIMULATIONS FOR LOW ENERGY ION BEAM THIN FILM FORMATION PROCESS AT DIFFERENT INCIDENT BEAM ENERGY AND SUBSTRATE TEMPERATURE

Computer Aided Innovation of New Materials ◽

10.1016/b978-0-444-88864-8.50082-0 ◽

1991 ◽

pp. 379-380

Author(s):

Takashi KAWAKUBO

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Beam Energy ◽

Film Formation ◽

Ion Beam ◽

Incident Beam ◽

Low Energy ◽

Thin Film Formation ◽

Dynamics Simulations ◽

Incident Beam Energy

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Thin film formation from low energy ions: new kinetic paths, new properties, new phases

Materials & Design (1980-2015) ◽

10.1016/0261-3069(92)90116-y ◽

1992 ◽

Vol 13 (2) ◽

pp. 95

Author(s):

N. Herbots

Keyword(s):

Thin Film ◽

Film Formation ◽

Low Energy ◽

Thin Film Formation ◽

Low Energy Ions

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High quality optical thin film formation with low energy gas cluster ion beam irradiation

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on ◽

10.1109/iit.2002.1258102 ◽

2002 ◽

Cited By ~ 1

Author(s):

N. Toyoda ◽

I. Yamada

Keyword(s):

Thin Film ◽

Film Formation ◽

Ion Beam ◽

Low Energy ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

High Quality ◽

Cluster Ion ◽

Thin Film Formation ◽

Gas Cluster Ion Beam

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The influence of low‐energy particle–surface interactions on the initial stages of thin film formation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577358 ◽

1991 ◽

Vol 9 (3) ◽

pp. 759-767 ◽

Cited By ~ 7

Author(s):

C. A. Stone ◽

N. M. Ghoniem

Keyword(s):

Thin Film ◽

Film Formation ◽

Particle Surface ◽

Surface Interactions ◽

Low Energy ◽

Energy Particle ◽

Thin Film Formation

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