High quality optical thin film formation with low energy gas cluster ion beam irradiation

2002 ◽  
Author(s):  
N. Toyoda ◽  
I. Yamada
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Low Energy ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
High Quality ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Optical thin film formation by gas-cluster ion beam assisted deposition

1999 ◽  
Author(s):  
H. Katsumata ◽  
J. Matsuo ◽  
T. Nishihara ◽  
T. Tachibana ◽  
K. Yamada ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Ion Beam ◽  
Optical Thin Film ◽  
Ion Beam Assisted Deposition ◽  
Cluster Ion ◽  
Thin Film Formation ◽  
Gas Cluster Ion Beam

Surface topography and composition of NiPd alloys under oblique and normal gas cluster ion beam irradiation

2020 ◽  
Vol 700 ◽  
pp. 121637
Author(s):  
A.E. Ieshkin ◽  
D.S. Kireev ◽  
A.A. Tatarintsev ◽  
V.S. Chernysh ◽  
B.R. Senatulin ◽  
...  
Keyword(s):  
Surface Topography ◽  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam

Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation

2014 ◽  
Vol 117 (2) ◽  
pp. 719-723 ◽  
Author(s):  
Ee Jin Teo ◽  
Noriaki Toyoda ◽  
Chengyuan Yang ◽  
Andrew A. Bettiol ◽  
Jing Hua Teng
Keyword(s):  
Ion Beam ◽  
Beam Irradiation ◽  
Ion Beam Irradiation ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam
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