Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films

1988 ◽  
Vol 6 (3) ◽  
pp. 1696-1698 ◽  
Author(s):  
F. Jansen ◽  
M. A. Machonkin
Keyword(s):  
Glow Discharge ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Thermomechanical Properties

Thermomechanical properties of amorphous silicon and nonstoichiometric silicon oxide films

1987 ◽  
Vol 62 (12) ◽  
pp. 4732-4736 ◽  
Author(s):  
F. Jansen ◽  
M. A. Machonkin ◽  
N. Palmieri ◽  
D. Kuhman
Keyword(s):  
Amorphous Silicon ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Thermomechanical Properties

The Composition and Properties of PECVD Silicon Oxide Films

1985 ◽  
Vol 132 (8) ◽  
pp. 2012-2019 ◽  
Author(s):  
P. Pan ◽  
L. A. Nesbit ◽  
R. W. Douse ◽  
R. T. Gleason
Keyword(s):  
Silicon Oxide ◽  
Oxide Films

The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

1970 ◽  
Vol 117 (2) ◽  
pp. 272 ◽  
Author(s):  
William A. FitzGibbons ◽  
Thomas Kloffenstein ◽  
Karl M. Busen
Keyword(s):  
Silicon Oxide ◽  
Oxide Films ◽  
Thermally Grown

scholarly journals Electron Beam Effects on Silicon Oxide Films – Structure and Electrical Properties

2018 ◽  
Vol 24 (S1) ◽  
pp. 1810-1811 ◽  
Author(s):  
Krishna Kanth Neelisetty ◽  
Sebastian Gutsch ◽  
Falk von Seggern ◽  
Alan Molinari ◽  
Alexander Vahl ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electrical Properties ◽  
Silicon Oxide ◽  
Oxide Films
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