Thermomechanical properties of amorphous silicon and nonstoichiometric silicon oxide films
2013 ◽
Vol 13
(12)
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pp. 7826-7833
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1988 ◽
Vol 6
(3)
◽
pp. 1696-1698
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Keyword(s):
2015 ◽
Vol 54
(8S1)
◽
pp. 08KB11
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