Summary Abstract: III–V molecular beam epitaxy: Toward a concept of all ultrahigh vacuum processing

James P. Harbison

doi:10.1116/1.573448

Summary Abstract: III–V molecular beam epitaxy: Toward a concept of all ultrahigh vacuum processing

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573448 ◽

1986 ◽

Vol 4 (3) ◽

pp. 1033-1034 ◽

Cited By ~ 4

Author(s):

James P. Harbison

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Vacuum Processing

Download Full-text

Performance of an ultrahigh‐vacuum sample transfer system for investigation of molecular‐beam epitaxy grown semiconductor surfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578656 ◽

1993 ◽

Vol 11 (5) ◽

pp. 2860-2862 ◽

Cited By ~ 13

Author(s):

X.‐S. Wang ◽

C. Huang ◽

V. Bressler‐Hill ◽

R. Maboudian ◽

W. H. Weinberg

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Semiconductor Surfaces ◽

Transfer System ◽

Sample Transfer

Download Full-text

Advanced electron beam source for ultrahigh vacuum (molecular beam epitaxy) and high vacuum applications of thin film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579026 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1628-1630 ◽

Cited By ~ 1

Author(s):

J. W. Moore ◽

N. K. Tsujimoto

Keyword(s):

Thin Film ◽

Electron Beam ◽

Molecular Beam Epitaxy ◽

Molecular Beam ◽

High Vacuum ◽

Ultrahigh Vacuum ◽

Thin Film Deposition ◽

Film Deposition ◽

Beam Source

Download Full-text

A low-energy, ultrahigh vacuum, solid-metal ion source for accelerated-ion doping during molecular beam epitaxy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.582814 ◽

1984 ◽

Vol 2 (3) ◽

pp. 306 ◽

Cited By ~ 33

Author(s):

A. Rockett

Keyword(s):

Molecular Beam Epitaxy ◽

Metal Ion ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Ion Source ◽

Solid Metal ◽

Low Energy ◽

Ion Doping

Download Full-text

Aluminum alloy ultrahigh vacuum system for molecular beam epitaxy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.573720 ◽

1986 ◽

Vol 4 (6) ◽

pp. 2515-2519 ◽

Cited By ~ 11

Author(s):

M. Miyamoto ◽

Y. Sumi ◽

S. Komaki ◽

K. Narushima ◽

H. Ishimaru

Keyword(s):

Aluminum Alloy ◽

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Vacuum System

Download Full-text

Ultrahigh vacuum atomic force microscope study of 10–30 nm scale GaAs ridge structure formation by molecular beam epitaxy

Applied Physics Letters ◽

10.1063/1.118303 ◽

1997 ◽

Vol 70 (7) ◽

pp. 883-885 ◽

Cited By ~ 6

Author(s):

S. Koshiba ◽

Ichiro Tanaka ◽

Y. Nakamura ◽

H. Noge ◽

H. Sakaki

Keyword(s):

Molecular Beam Epitaxy ◽

Atomic Force Microscope ◽

Structure Formation ◽

Microscope Study ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Ridge Structure ◽

Atomic Force

Download Full-text

Ultrahigh vacuum arcjet nitrogen source for selected energy epitaxy of group III nitrides by molecular beam epitaxy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581129 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1615-1620 ◽

Cited By ~ 15

Author(s):

F. J. Grunthaner ◽

R. Bicknell-Tassius ◽

P. Deelman ◽

P. J. Grunthaner ◽

C. Bryson ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Nitrogen Source ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Group Iii Nitrides ◽

Group Iii

Download Full-text

Apparatus for producing ultraclean bicrystals by the molecular beam epitaxy growth and ultrahigh vacuum bonding of thin films

Review of Scientific Instruments ◽

10.1063/1.1144344 ◽

1993 ◽

Vol 64 (10) ◽

pp. 2983-2992 ◽

Cited By ~ 10

Author(s):

A. Amiri‐Hezaveh ◽

R. W. Balluffi

Keyword(s):

Thin Films ◽

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Molecular Beam Epitaxy Growth

Download Full-text

Ge quantum dot arrays grown by ultrahigh vacuum molecular-beam epitaxy on the Si(001) surface: nucleation, morphology, and CMOS compatibility

Nanoscale Research Letters ◽

10.1186/1556-276x-6-522 ◽

2011 ◽

Vol 6 (1) ◽

Cited By ~ 16

Author(s):

Vladimir A Yuryev ◽

Larisa V Arapkina

Keyword(s):

Molecular Beam Epitaxy ◽

Quantum Dot ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Surface Nucleation ◽

Cmos Compatibility ◽

Ge Quantum Dot

Download Full-text

Chemical dry etching of GaAs and InP by Cl2using a new ultrahigh‐vacuum dry‐etching molecular‐beam‐epitaxy system

Journal of Applied Physics ◽

10.1063/1.342564 ◽

1989 ◽

Vol 65 (1) ◽

pp. 168-171 ◽

Cited By ~ 42

Author(s):

N. Furuhata ◽

H. Miyamoto ◽

A. Okamoto ◽

K. Ohata

Keyword(s):

Molecular Beam Epitaxy ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Dry Etching ◽

Molecular Beam Epitaxy System

Download Full-text

Ultrahigh vacuum sample heating stage for molecular beam epitaxy applications with transfer mechanism to a remote scanning tunneling microscope

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589997 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1258 ◽

Cited By ~ 3

Author(s):

T. Mendus

Keyword(s):

Molecular Beam Epitaxy ◽

Scanning Tunneling Microscope ◽

Molecular Beam ◽

Ultrahigh Vacuum ◽

Transfer Mechanism ◽

Scanning Tunneling ◽

Tunneling Microscope ◽

Heating Stage ◽

Sample Heating

Download Full-text