Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
2019 ◽
Vol 37
(3)
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pp. 031301
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2013 ◽
Vol 33
(8)
◽
pp. 1374-1382
Keyword(s):
2005 ◽
Vol 10
(2)
◽
pp. 197-209
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Keyword(s):
Keyword(s):
Keyword(s):