Chromium oxide as a hard mask material better than metallic chromium

2017 ◽  
Vol 35 (6) ◽  
pp. 06GB01 ◽  
Author(s):  
Ferhat Aydinoglu ◽  
Faycal Saffih ◽  
Ripon Kumar Dey ◽  
Bo Cui
Keyword(s):  
Chromium Oxide ◽  
Hard Mask ◽  
Metallic Chromium ◽  
Mask Material ◽  
Better Than

New silicon hard mask material development for sub-5nm node

2019 ◽  
Author(s):  
Tomoaki Seko ◽  
Tatsuya Kasai ◽  
Ryuuichi Serizawa ◽  
Satoshi Dei ◽  
Tatsuya Sakai
Keyword(s):  
Hard Mask ◽  
Material Development ◽  
Mask Material

The Role of Oxygen on Anisotropy in Chromium Oxide Hard Mask Etching for Sub-Micron Fabrication

2021 ◽  
Vol 20 ◽  
pp. 33-38
Author(s):  
Huseyin Ekinci ◽  
Navid M.S. Jahed ◽  
Mohammad Soltani ◽  
Bo Cui
Keyword(s):  
Chromium Oxide ◽  
Hard Mask ◽  
Mask Etching

Impact of Sacrificial Hard Mask Material in BEOL Integration in Advanced Technology

2019 ◽  
Author(s):  
Eswar Ramanathan ◽  
Henrik Johanson ◽  
Daniel Damjanovic ◽  
ZhiGuo Sun ◽  
Anirvan Sircar ◽  
...  
Keyword(s):  
Advanced Technology ◽  
Hard Mask ◽  
Mask Material

Dual-Damascene Cu/Low-k Interconnect Fabrication Scheme Using Dissoluble Hard Mask Material

2006 ◽  
Vol 153 (2) ◽  
pp. G160 ◽  
Author(s):  
Takeshi Furusawa ◽  
Shuntaro Machida ◽  
Daisuke Ryuzaki ◽  
Kenji Sameshima ◽  
Takeshi Ishida ◽  
...  
Keyword(s):  
Hard Mask ◽  
Dual Damascene ◽  
Mask Material ◽  
Low K

Progress of hard mask material for multi-layer stack application

2007 ◽  
Author(s):  
Hisanobu Harada ◽  
Koji Yonemura ◽  
Takeshi Tanaka ◽  
Daisuke Kawana ◽  
Naoki Yamashita ◽  
...  
Keyword(s):  
Hard Mask ◽  
Mask Material

Process for Coating Tin-Free Steel with Layers of Metallic Chromium and Chromium Oxide

1969 ◽  
Vol 116 (3) ◽  
pp. 398 ◽  
Author(s):  
Nobuo Fukuda ◽  
Shigeru Yonezaki ◽  
Hajime Nitto ◽  
Minoru Kamada ◽  
Hidejiro Asano ◽  
...  
Keyword(s):  
Chromium Oxide ◽  
Metallic Chromium

Time and Latitude in South Africa

1972 ◽  
Vol 1 ◽  
pp. 27-38
Author(s):  
J. Hers
Keyword(s):  
South Africa ◽  
Cape Town ◽  
Astronomical Observations ◽  
Royal Observatory ◽  
The Republic ◽  
Astronomical Determination ◽  
Limited Accuracy ◽  
Better Than

In South Africa the modern outlook towards time may be said to have started in 1948. Both the two major observatories, The Royal Observatory in Cape Town and the Union Observatory (now known as the Republic Observatory) in Johannesburg had, of course, been involved in the astronomical determination of time almost from their inception, and the Johannesburg Observatory has been responsible for the official time of South Africa since 1908. However the pendulum clocks then in use could not be relied on to provide an accuracy better than about 1/10 second, which was of the same order as that of the astronomical observations. It is doubtful if much use was made of even this limited accuracy outside the two observatories, and although there may – occasionally have been a demand for more accurate time, it was certainly not voiced.

Localization of immunolabels by electron microscopy and image averaging

1983 ◽  
Vol 41 ◽  
pp. 282-283
Author(s):  
J. Frank ◽  
P.-Y. Sizaret ◽  
A. Verschoor ◽  
J. Lamy
Keyword(s):  
Electron Microscopy ◽  
Single Particle ◽  
Attachment Site ◽  
Uranyl Acetate ◽  
Limulus Polyphemus ◽  
Resolution Limit ◽  
Electron Microscopic ◽  
Image Averaging ◽  
Top View ◽  
Better Than

The accuracy with which the attachment site of immunolabels bound to macromolecules may be localized in electron microscopic images can be considerably improved by using single particle averaging. The example studied in this work showed that the accuracy may be better than the resolution limit imposed by negative staining (∽2nm).The structure used for this demonstration was a halfmolecule of Limulus polyphemus (LP) hemocyanin, consisting of 24 subunits grouped into four hexamers. The top view of this structure was previously studied by image averaging and correspondence analysis. It was found to vary according to the flip or flop position of the molecule, and to the stain imbalance between diagonally opposed hexamers (“rocking effect”). These findings have recently been incorporated into a model of the full 8 × 6 molecule.LP hemocyanin contains eight different polypeptides, and antibodies specific for one, LP II, were used. Uranyl acetate was used as stain. A total of 58 molecule images (29 unlabelled, 29 labelled with antl-LPII Fab) showing the top view were digitized in the microdensitometer with a sampling distance of 50μ corresponding to 6.25nm.

Closing the GAP—A 5Å Scanning Microscope

1969 ◽  
Vol 27 ◽  
pp. 6-7
Author(s):  
A. V. Crewe
Keyword(s):  
Normal Form ◽  
The Other ◽  
Resolving Power ◽  
Scanning Microscope ◽  
Conventional Microscope ◽  
Other Hand ◽  
Closing The Gap ◽  
Thermal Sources ◽  
Better Than ◽  
Transmission Microscope

We have become accustomed to differentiating between the scanning microscope and the conventional transmission microscope according to the resolving power which the two instruments offer. The conventional microscope is capable of a point resolution of a few angstroms and line resolutions of periodic objects of about 1Å. On the other hand, the scanning microscope, in its normal form, is not ordinarily capable of a point resolution better than 100Å. Upon examining reasons for the 100Å limitation, it becomes clear that this is based more on tradition than reason, and in particular, it is a condition imposed upon the microscope by adherence to thermal sources of electrons.

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