scholarly journals Wet-cleaning of MgO(001): Modification of surface chemistry and effects on thin film growth investigated by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectroscopy

2017 ◽  
Vol 35 (2) ◽  
pp. 021407 ◽  
Author(s):  
Arnaud Le Febvrier ◽  
Jens Jensen ◽  
Per Eklund
Keyword(s):  
Thin Film ◽  
Surface Chemistry ◽  
Mass Spectroscopy ◽  
Photoelectron Spectroscopy ◽  
Film Growth ◽  
Time Of Flight ◽  
Thin Film Growth ◽  
Secondary Ion Mass Spectroscopy ◽  
X Ray ◽  
Secondary Ion

scholarly journals Phosphorus Behavior in Heavily Phosphorus-Doped Silicon Surfaces due to Annealing. X-Ray Photoelectron Spectroscopy and Secondary Ion Mass Spectroscopy.

Shinku ◽  
1995 ◽  
Vol 38 (3) ◽  
pp. 295-298 ◽  
Author(s):  
Wen Biao YING ◽  
Yusuke MIZOKAWA ◽  
Yoshitomo KAMIURA ◽  
Yong Bing YU ◽  
Masafumi NISHIMATSU ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Photoelectron Spectroscopy ◽  
Silicon Surfaces ◽  
Secondary Ion Mass Spectroscopy ◽  
X Ray ◽  
Doped Silicon ◽  
Phosphorus Doped ◽  
Secondary Ion
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