X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr–V low activation temperature nonevaporable getter films

2003 ◽  
Vol 21 (3) ◽  
pp. 797-805 ◽  
Author(s):  
Karel Mas̆ek ◽  
Frantis̆ek S̆utara ◽  
Tomás̆ Skála ◽  
Jir̆ı́ Drbohlav ◽  
Kater̆ina Veltruská ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Photoelectron Spectroscopy ◽  
Activation Mechanism ◽  
Spectroscopy Study ◽  
Activation Temperature ◽  
Secondary Ion Mass Spectroscopy ◽  
X Ray ◽  
Secondary Ion

scholarly journals Phosphorus Behavior in Heavily Phosphorus-Doped Silicon Surfaces due to Annealing. X-Ray Photoelectron Spectroscopy and Secondary Ion Mass Spectroscopy.

Shinku ◽  
1995 ◽  
Vol 38 (3) ◽  
pp. 295-298 ◽  
Author(s):  
Wen Biao YING ◽  
Yusuke MIZOKAWA ◽  
Yoshitomo KAMIURA ◽  
Yong Bing YU ◽  
Masafumi NISHIMATSU ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Photoelectron Spectroscopy ◽  
Silicon Surfaces ◽  
Secondary Ion Mass Spectroscopy ◽  
X Ray ◽  
Doped Silicon ◽  
Phosphorus Doped ◽  
Secondary Ion
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