Silicon nanostructures with very large negatively tapered profile by inductively coupled plasma-RIE

2016 ◽  
Vol 34 (6) ◽  
pp. 06KD01 ◽  
Author(s):  
Asma Ayari-Kanoun ◽  
Ferhat Aydinoglu ◽  
Bo Cui ◽  
Faycal Saffih
Keyword(s):  
Inductively Coupled Plasma ◽  
Silicon Nanostructures ◽  
Inductively Coupled

scholarly journals Ultrafast Carrier Relaxation Dynamics in Quantum Confined Non-Isotropic Silicon Nanostructures Synthesized by an Inductively Coupled Plasma Process

Materials ◽  
2020 ◽  
Vol 13 (19) ◽  
pp. 4267
Author(s):  
Stefano Ponzoni ◽  
Sonia Freddi ◽  
Marta Agati ◽  
Vincent Le Borgne ◽  
Simona Boninelli ◽  
...  
Keyword(s):  
Photon Energy ◽  
Silicon Nanowires ◽  
Inductively Coupled Plasma ◽  
Inner Core ◽  
Optical Measurements ◽  
Spectral Energy ◽  
Silicon Nanostructures ◽  
Relaxation Dynamics ◽  
Plasma Process ◽  
Inductively Coupled

To exploit the optoelectronic properties of silicon nanostructures (SiNS) in real devices, it is fundamental to study the ultrafast processes involving the photogenerated charges separation, migration and lifetime after the optical excitation. Ultrafast time-resolved optical measurements provide such information. In the present paper, we report on the relaxation dynamics of photogenerated charge-carriers in ultrafine SiNS synthesized by means of inductively-coupled-plasma process. The carriers’ transient regime was characterized in high fluence regime by using a tunable pump photon energy and a broadband probe pulse with a photon energy ranging from 1.2 eV to 2.8 eV while varying the energy of the pump photons and their polarization. The SiNS consist of Si nanospheres and nanowires (NW) with a crystalline core embedded in a SiOx outer-shell. The NW inner core presents different typologies: long silicon nanowires (SiNW) characterized by a continuous core (with diameters between 2 nm and 15 nm and up to a few microns long), NW with disconnected fragments of SiNW (each fragment with a length down to a few nanometers), NW with a “chaplet-like” core and NW with core consisting of disconnected spherical Si nanocrystals. Most of these SiNS are asymmetric in shape. Our results reveal a photoabsorption (PA) channel for pump and probe parallel polarizations with a maximum around 2.6 eV, which can be associated to non-isotropic ultra-small SiNS and ascribed either to (i) electron absorption driven by the probe from some intermediate mid-gap states toward some empty state above the bottom of the conduction band or (ii) the Drude-like free-carrier presence induced by the direct-gap transition in the their band structure. Moreover, we pointed up the existence of a broadband and long-living photobleaching (PB) in the 1.2–2.0 eV energy range with a maximum intensity around 1.35 eV which could be associated to some oxygen related defect states present at the Si/SiOx interface. On the other hand, this wide spectral energy PB can be also due to both silicon oxide band-tail recombination and small Si nanostructure excitonic transition.

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