Thin electron beam defined hydrogen silsesquioxane spacers for vertical nanowire transistors
2014 ◽
Vol 32
(5)
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pp. 051211
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2008 ◽
Vol 26
(6)
◽
pp. 2049-2053
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Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist
2003 ◽
Vol 21
(5)
◽
pp. 2018
◽
2010 ◽
Vol 28
(3)
◽
pp. 581-587
◽
2011 ◽
Vol 88
(8)
◽
pp. 2338-2341
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