scholarly journals Polymethyl methacrylate/hydrogen silsesquioxane bilayer resist electron beam lithography process for etching 25 nm wide magnetic wires

2014 ◽  
Vol 32 (2) ◽  
pp. 021601 ◽  
Author(s):  
Jean Anne Currivan ◽  
Saima Siddiqui ◽  
Sungmin Ahn ◽  
Larysa Tryputen ◽  
Geoffrey S. D. Beach ◽  
...  
Keyword(s):  
Electron Beam ◽  
Polymethyl Methacrylate ◽  
Electron Beam Lithography ◽  
Hydrogen Silsesquioxane ◽  
Lithography Process ◽  
Magnetic Wires

Salicidation process for submicrometre gate MOSFET fabrication using a resistless electron beam lithography process

1999 ◽  
Vol 35 (15) ◽  
pp. 1283 ◽  
Author(s):  
S. Michel ◽  
E. Lavallée ◽  
J. Beauvais ◽  
J. Mouine
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Lithography Process

Fabrication of X-Ray Masks Using the Silicon Direct Write Electron-Beam Lithography Process and Complementary Electron-Sensitive Resists

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4122-4126
Author(s):  
Eric Lavallée ◽  
Jacques Beauvais ◽  
Dominique Drouin ◽  
Mélanie Cloutier ◽  
Pan Yang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Direct Write ◽  
X Ray ◽  
Lithography Process
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