scholarly journals High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers

2010 ◽  
Vol 28 (1) ◽  
pp. C1C65-C1C70 ◽  
Author(s):  
M. A. Reading ◽  
J. A. van den Berg ◽  
P. C. Zalm ◽  
D. G. Armour ◽  
P. Bailey ◽  
...  
Keyword(s):  
High Resolution ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
High K ◽  
Medium Energy Ion Scattering

scholarly journals Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering

2008 ◽  
Vol 92 (16) ◽  
pp. 164102 ◽  
Author(s):  
R. P. Pezzi ◽  
C. Krug ◽  
P. L. Grande ◽  
E. B. O. da Rosa ◽  
G. Schiwietz ◽  
...  
Keyword(s):  
High Resolution ◽  
Energy Loss ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Loss Distribution ◽  
Medium Energy Ion Scattering

Depth-profiling the composition of bimetallic nanoparticles using medium energy ion scattering

2011 ◽  
Vol 605 (1-2) ◽  
pp. 220-224 ◽  
Author(s):  
Johan Gustafson ◽  
Andrew R. Haire ◽  
Christopher J. Baddeley
Keyword(s):  
Bimetallic Nanoparticles ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

Depth profiling analysis of HfON on SiON ultrathin films by parallel angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

2016 ◽  
Vol 48 (7) ◽  
pp. 436-439 ◽  
Author(s):  
Laurent Fauquier ◽  
Bernard Pelissier ◽  
Denis Jalabert ◽  
François Pierre ◽  
Delphine Doloy ◽  
...  
Keyword(s):  
Ultrathin Films ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Medium Energy ◽  
Ion Scattering ◽  
X Ray ◽  
Medium Energy Ion Scattering ◽  
Profiling Analysis
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