Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O2 as an additive gas
2009 ◽
Vol 27
(6)
◽
pp. 1271-1274
Keyword(s):
2008 ◽
Vol 26
(4)
◽
pp. 605-617
◽
2002 ◽
Vol 65
(4-5)
◽
pp. 579-587
◽
Keyword(s):