Effect of sidewall passivation in BCl[sub 3]∕N[sub 2] inductively coupled plasma etching of two-dimensional GaAs photonic crystals

2009 ◽  
Vol 27 (5) ◽  
pp. L21 ◽  
Author(s):  
Kirill A. Atlasov ◽  
Pascal Gallo ◽  
Alok Rudra ◽  
Benjamin Dwir ◽  
Eli Kapon
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Sidewall Passivation

Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching

2004 ◽  
Vol 95 (5) ◽  
pp. 2242-2245 ◽  
Author(s):  
F. Pommereau ◽  
L. Legouézigou ◽  
S. Hubert ◽  
S. Sainson ◽  
J.-P. Chandouineau ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Low Loss ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

scholarly journals Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

2007 ◽  
Vol 56 (2) ◽  
pp. 977
Author(s):  
Ma Xiao-Tao ◽  
Zheng Wan-Hua ◽  
Ren Gang ◽  
Fan Zhong-Chao ◽  
Chen Liang-Hui
Keyword(s):  
Photonic Crystal ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Optical characterisation of 2D InP-based photonic crystals fabricated by inductively coupled plasma etching

2002 ◽  
Vol 38 (17) ◽  
pp. 962 ◽  
Author(s):  
R. Ferrini ◽  
B. Lombardet ◽  
B. Wild ◽  
R. Houdré ◽  
S. Olivier ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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