scholarly journals Cl[sub 2]∕O[sub 2]-inductively coupled plasma etching of deep hole-type photonic crystals in InP

2006 ◽  
Vol 24 (1) ◽  
pp. L6 ◽  
Author(s):  
C. F. Carlström ◽  
R. van der Heijden ◽  
F. Karouta ◽  
R. W. van der Heijden ◽  
H. W. M. Salemink ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Deep Hole ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Optical characterisation of 2D InP-based photonic crystals fabricated by inductively coupled plasma etching

2002 ◽  
Vol 38 (17) ◽  
pp. 962 ◽  
Author(s):  
R. Ferrini ◽  
B. Lombardet ◽  
B. Wild ◽  
R. Houdré ◽  
S. Olivier ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Fabrication of low loss two-dimensional InP photonic crystals by inductively coupled plasma etching

2004 ◽  
Vol 95 (5) ◽  
pp. 2242-2245 ◽  
Author(s):  
F. Pommereau ◽  
L. Legouézigou ◽  
S. Hubert ◽  
S. Sainson ◽  
J.-P. Chandouineau ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Two Dimensional ◽  
Low Loss ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
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