High-resolution Rutherford backscattering spectrometry study on process dependent elemental depth profile change of hafnium silicate on silicon
2009 ◽
Vol 27
(4)
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pp. 937-942
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2011 ◽
Vol 269
(17)
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pp. 1947
1986 ◽
Vol 324
(2)
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pp. 111-119
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