Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma

2007 ◽  
Vol 25 (4) ◽  
pp. 1166 ◽  
Author(s):  
C. Biasotto ◽  
A. M. Daltrini ◽  
R. C. Teixeira ◽  
F. A. Boscoli ◽  
J. A. Diniz ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Silicon Oxide ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Oxide Layers ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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