Silicon oxide deposition in an electron cyclotron resonance plasma with microwave spectroscopic monitoring of SiO

1995 ◽  
Vol 13 (5) ◽  
pp. 2483-2489 ◽  
Author(s):  
Kok Heng Chew ◽  
Jian Chen ◽  
R. Claude Woods ◽  
J. Leon Shohet
Keyword(s):  
Cyclotron Resonance ◽  
Silicon Oxide ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Spectroscopic Monitoring ◽  
Oxide Deposition ◽  
Resonance Plasma

Simulation of Plasma Production and Chemical Reaction in an Oxide Deposition Apparatus Using Electron Cyclotron Resonance Plasma

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4769-4772 ◽  
Author(s):  
Tamotsu Morimoto ◽  
Yasuyoshi Yasaka ◽  
Masaki Tozawa ◽  
Takashi Akahori ◽  
Hideaki Amano ◽  
...  
Keyword(s):  
Chemical Reaction ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Production ◽  
Oxide Deposition ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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