Room‐temperature visible photoluminescence from silicon‐rich oxide layers deposited by an electron cyclotron resonance plasma source

Keunjoo Kim; M. S. Suh; T S. Kim; C. J. Youn; E. K. Suh; Y. J. Shin; K. B. Lee; H. J. Lee; M. H. An; H. J. Lee; H. Ryu

doi:10.1063/1.117566

Room‐temperature visible photoluminescence from silicon‐rich oxide layers deposited by an electron cyclotron resonance plasma source

Applied Physics Letters ◽

10.1063/1.117566 ◽

1996 ◽

Vol 69 (25) ◽

pp. 3908-3910 ◽

Cited By ~ 41

Author(s):

Keunjoo Kim ◽

M. S. Suh ◽

T S. Kim ◽

C. J. Youn ◽

E. K. Suh ◽

...

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Oxide Layers ◽

Visible Photoluminescence ◽

Resonance Plasma

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Electron cyclotron resonance plasma source for conductive film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579309 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1281-1286 ◽

Cited By ~ 31

Author(s):

Toshiro Ono ◽

Hiroshi Nishimura ◽

Masaru Shimada ◽

Seitaro Matsuo

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Electron Cyclotron Resonance Plasma ◽

Conductive Film ◽

Resonance Plasma

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Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source

30th European Solid-State Device Research Conference ◽

10.1109/essderc.2000.194805 ◽

2000 ◽

Author(s):

G.I. Isai ◽

A.Y. Kovalgin ◽

J. Holleman ◽

P.H. Woerlee ◽

H. Wallinga ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Gate Dielectrics ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l802 ◽

1993 ◽

Vol 32 (Part 2, No. 6A) ◽

pp. L802-L805 ◽

Cited By ~ 3

Author(s):

Akira Ishii ◽

Yoshiyuki Sakaguchi ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Diamond Like Carbon ◽

Electron Cyclotron Resonance Plasma ◽

Diamond Like Carbon Film ◽

Resonance Plasma

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Design and performance of an electron cyclotron resonance plasma source for standard molecular beam epitaxy equipment

Review of Scientific Instruments ◽

10.1063/1.1141371 ◽

1990 ◽

Vol 61 (9) ◽

pp. 2407-2411 ◽

Cited By ~ 50

Author(s):

Z. Sitar ◽

M. J. Paisley ◽

D. K. Smith ◽

R. F. Davis

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

And Performance ◽

Resonance Plasma

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Super‐wide electron cyclotron resonance plasma source excited by traveling microwave as an efficient tool for diamondlike carbon film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579302 ◽

1994 ◽

Vol 12 (4) ◽

pp. 1241-1243

Author(s):

A. Ishii ◽

S. Amadatsu ◽

S. Minomo ◽

M. Taniguchi ◽

M. Sugiyo ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Film ◽

Plasma Source ◽

Electron Cyclotron ◽

Film Deposition ◽

Efficient Tool ◽

Electron Cyclotron Resonance Plasma ◽

Diamondlike Carbon ◽

Resonance Plasma

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SiC x-ray lithography mask fabricated by electron cyclotron resonance plasma source coupled with divided microwaves

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589378 ◽

1997 ◽

Vol 15 (3) ◽

pp. 736 ◽

Cited By ~ 2

Author(s):

Masaru Shimada

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

X Ray ◽

Resonance Plasma

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An Evaluation Of an End Excited Electron Cyclotron Resonance Plasma Source

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588708 ◽

2005 ◽

Author(s):

P. Mak ◽

J. Asmussen

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Excited Electron ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Permanent magnet electron cyclotron resonance plasma source with remote window

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579420 ◽

1995 ◽

Vol 13 (2) ◽

pp. 343-348 ◽

Cited By ~ 9

Author(s):

Lee A. Berry ◽

S. M. Gorbatkin

Keyword(s):

Permanent Magnet ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.

Thin Solid Films ◽

10.1016/0040-6090(96)80068-x ◽

1995 ◽

Vol 270 (1-2) ◽

pp. 49-54 ◽

Cited By ~ 12

Author(s):

J.C. Rostaing ◽

F. Coeuret ◽

J. Pelletier ◽

T. Lagarde ◽

R. Etemadi

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Silica Coatings ◽

Resonance Plasma

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Characterization of He-induced Bubble Formation in Tungsten due to Exposure from an Electron Cyclotron Resonance Plasma Source

Fusion Science & Technology ◽

10.1080/15361055.2017.1333856 ◽

2017 ◽

pp. 1-10 ◽

Cited By ~ 2

Author(s):

D. Donovan ◽

D. Buchenauer ◽

J. Whaley ◽

G. Wright ◽

C.M. Parish ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Bubble Formation ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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