Compositional effect on the dielectric properties of high-k titanium silicate thin films deposited by means of a cosputtering process

2006 ◽  
Vol 24 (3) ◽  
pp. 600-605 ◽  
Author(s):  
D. Brassard ◽  
D. K. Sarkar ◽  
M. A. El Khakani ◽  
L. Ouellet
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Titanium Silicate ◽  
Compositional Effect ◽  
High K

Dielectric properties of sol–gel derived high-k titanium silicate thin films

2007 ◽  
Vol 515 (11) ◽  
pp. 4788-4793 ◽  
Author(s):  
D.K. Sarkar ◽  
D. Brassard ◽  
M.A. El Khakani ◽  
L. Ouellet
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
Sol Gel ◽  
Titanium Silicate ◽  
High K

Morphology and Composition of Praseodymium Based High-k Materials and Their Relevance to Dielectric Properties of Thin-Films

2019 ◽  
Vol 6 (3) ◽  
pp. 773-805 ◽  
Author(s):  
Gunther Lippert ◽  
Jarek Dabrowski ◽  
Ioan Costina ◽  
Grzegorz Lupina ◽  
Markus Ratzke ◽  
...  
Keyword(s):  
Thin Films ◽  
Dielectric Properties ◽  
High K ◽  
High K Materials
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