Gate oxide reliability in an integrated metal-oxide-semiconductor field-effect transistor-microelectromechanical system technology
2010 ◽
Vol 49
(12)
◽
pp. 128002
◽
Keyword(s):
2020 ◽
Vol 118
◽
pp. 113803
1998 ◽
Vol 37
(Part 1, No. 11)
◽
pp. 5926-5931
2016 ◽
Vol 10
(1)
◽
pp. 62-67
◽
2005 ◽
Vol 44
(8)
◽
pp. 5889-5892
◽
Keyword(s):
Keyword(s):
1995 ◽
Vol 13
(6)
◽
pp. 2226
◽