Lithographic characterization of the field dependent astigmatism and alignment stability of a 0.3 numerical aperture extreme ultraviolet microfield optic

2005 ◽  
Vol 23 (5) ◽  
pp. 2003 ◽  
Author(s):  
Patrick P. Naulleau ◽  
Jason P. Cain ◽  
Kenneth A. Goldberg
Keyword(s):  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
Field Dependent

scholarly journals Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy

Sensors ◽  
2020 ◽  
Vol 20 (22) ◽  
pp. 6426
Author(s):  
Mabel Ruiz-Lopez ◽  
Masoud Mehrjoo ◽  
Barbara Keitel ◽  
Elke Plönjes ◽  
Domenico Alj ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
Laser Flash ◽  
Optical Systems ◽  
Wavefront Sensor ◽  
Reliable Technique ◽  
Phase Measurements ◽  
X Ray ◽  
Classical Calculation

Wavefront analysis is a fast and reliable technique for the alignment and characterization of optics in the visible, but also in the extreme ultraviolet (EUV) and X-ray regions. However, the technique poses a number of challenges when used for optical systems with numerical apertures (NA) > 0.1. A high-numerical-aperture Hartmann wavefront sensor was employed at the free electron laser FLASH for the characterization of a Schwarzschild objective. These are widely used in EUV to achieve very small foci, particularly for photolithography. For this purpose, Schwarzschild objectives require highly precise alignment. The phase measurements acquired with the wavefront sensor were analyzed employing two different methods, namely, the classical calculation of centroid positions and Fourier demodulation. Results from both approaches agree in terms of wavefront maps with negligible degree of discrepancy.

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems

2000 ◽  
Vol 39 (17) ◽  
pp. 2941 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Eric M. Gullikson ◽  
Jeffrey Bokor
Keyword(s):  
Extreme Ultraviolet ◽  
System Level ◽  
Optical Systems

scholarly journals Temperature- and field-dependent characterization of a conductor on round core cable

2015 ◽  
Vol 28 (6) ◽  
pp. 065007 ◽  
Author(s):  
C Barth ◽  
D C van der Laan ◽  
N Bagrets ◽  
C M Bayer ◽  
K-P Weiss ◽  
...  
Keyword(s):  
Field Dependent

scholarly journals Direct spectrotemporal characterization of femtosecond extreme-ultraviolet pulses

2013 ◽  
Vol 88 (3) ◽  
Author(s):  
David Gauthier ◽  
Benoît Mahieu ◽  
Giovanni De Ninno
Keyword(s):  
Extreme Ultraviolet

scholarly journals Material Characterization of Magnetorheological Elastomers with Corroded Carbonyl Iron Particles: Morphological Images and Field-dependent Viscoelastic Properties

2019 ◽  
Vol 20 (13) ◽  
pp. 3311 ◽  
Author(s):  
Siti Aishah Binti Abdul Aziz ◽  
Saiful Amri Mazlan ◽  
Nur Azmah Nordin ◽  
Nor Azlin Nazira Abd Rahman ◽  
U Ubaidillah ◽  
...  
Keyword(s):  
Carbonyl Iron ◽  
Matrix Material ◽  
Rheological Characteristics ◽  
Iron Particles ◽  
Ambient Conditions ◽  
X Ray ◽  
Field Dependent ◽  
Mr Effect

High temperatures and humidity could alter the field-dependent rheological properties of MR materials. These environmental phenomena may accelerate the deterioration processes that will affect the long-term rheological reliability of MR materials such as MR elastomer (MRE). This study therefore attempts to investigate the field-dependent rheological characteristics of MRE with corroded carbonyl iron particles (CIPs). The corroded CIPs were treated with hydrochloric acid (HCl) as a way of providing realistic environments in gauging the CIPs reaction towards the ambient conditions. The corroded CIPs along with silicone rubber as a matrix material were used in the fabrication of the MRE samples. To observe the effect of HCl treatment on the CIPs, the morphological observations of MREs with non-corroded and corroded CIPs were investigated via field emission scanning electron microscopy (FESEM), energy-dispersive x-ray spectroscopy (EDX) and x-ray diffractometer (XRD). In addition, the magnetic properties were examined through the vibrating sample magnetometer (VSM), while the field-dependent rheological characteristics such as the storage modulus of MRE with the corroded CIPs were also tested and compared with the non-corroded CIPs. The results showed that the corroded CIPs possessed hydrangea-like structures. In the meantime, it was identified that a sudden reduction of up to 114% of the field-dependent MR effect of MRE with the corroded CIPs was observed as a result of the weakened interfacial bonding between the CIPs and the silicon in the outer layers of the CIPs structure.

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