scholarly journals Optimization of an inductively coupled plasma etching process of GaInP∕GaAs based material for photonic band gap applications

2005 ◽  
Vol 23 (4) ◽  
pp. 1521 ◽  
Author(s):  
S. Combrié ◽  
S. Bansropun ◽  
M. Lecomte ◽  
O. Parillaud ◽  
S. Cassette ◽  
...  
Keyword(s):  
Band Gap ◽  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Photonic Band Gap ◽  
Etching Process ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Plasma Etching Process ◽  
Photonic Band

Fabrication of Two-Dimensional InP Photonic Band-Gap Crystals by Reactive Ion Etching with Inductively Coupled Plasma

1997 ◽  
Vol 36 (Part 1, No. 12B) ◽  
pp. 7763-7768 ◽  
Author(s):  
Yasufumi Fujiwara ◽  
Koji Kikuchi ◽  
Masayuki Hashimoto ◽  
Hitoshi Hatate ◽  
Toshiaki Imai ◽  
...  
Keyword(s):  
Band Gap ◽  
Inductively Coupled Plasma ◽  
Photonic Band Gap ◽  
Reactive Ion Etching ◽  
Two Dimensional ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Photonic Band

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

2012 ◽  
Author(s):  
Jean Nguyen ◽  
John Gill ◽  
Sir B. Rafol ◽  
Alexander Soibel ◽  
Arezou Khoshakhlagh ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

2005 ◽  
Vol 34 (6) ◽  
pp. 740-745 ◽  
Author(s):  
E. Laffosse ◽  
J. Baylet ◽  
J. P. Chamonal ◽  
G. Destefanis ◽  
G. Cartry ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
Sign in / Sign up

Export Citation Format

Share Document