Ultraviolet-induced damage in fluorocarbon plasma and its reduction by pulse-time-modulated plasma in charge coupled device image sensor wafer processes
2004 ◽
Vol 22
(6)
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pp. 2818
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2003 ◽
Vol 42
(Part 1, No. 4B)
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pp. 2444-2448
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Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 12A)
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pp. 5754-5758
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Keyword(s):
2019 ◽
Vol 13
(4)
◽
pp. 448-477
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2003 ◽
Vol 21
(6)
◽
pp. 2448
◽
Keyword(s):