Reduction of ultraviolet-radiation damage in SiO[sub 2] using pulse-time-modulated plasma and its application to charge coupled 44 device image sensor processes
2003 ◽
Vol 21
(6)
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pp. 2448
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2004 ◽
Vol 22
(2)
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pp. 861
1994 ◽
pp. 175-180
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Keyword(s):
1991 ◽
Vol 9
(3)
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pp. 804-809
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2019 ◽
Vol 28
(3)
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pp. 330-338
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1973 ◽
Vol 52
(4)
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pp. 1241-1245
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1981 ◽
Vol 80
(2)
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pp. 381-388
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Keyword(s):