Reduction of ultraviolet-radiation damage in SiO[sub 2] using pulse-time-modulated plasma and its application to charge coupled 44 device image sensor processes

Author(s):  
Mitsuru Okigawa ◽  
Yasushi Ishikawa ◽  
Seiji Samukawa
2020 ◽  
Vol 49 (5) ◽  
pp. 20190555
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冯婕 Jie Feng ◽  
李豫东 Yudong Li ◽  
文林 Lin Wen ◽  
郭旗 Qi Guo

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pp. 330-338 ◽  
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Feng Liu ◽  
Chen Lin ◽  
Jinsheng Hong ◽  
Chuanshu Cai ◽  
Weijian Zhang ◽  
...  

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E.M. Fearon ◽  
R.T. Tsugawa ◽  
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J.D. Poll ◽  
J.L. Hunt

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Kanji Ishizaki ◽  
Masao Inoue ◽  
Takashi Yagi ◽  
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