Optimization of post-N[sub 2] treatment and undoped-Si-glass cap to improve metal wring delamination in deep submicron high-density plasma-fluorinated silica glass intermetal dielectric application

2004 ◽  
Vol 22 (4) ◽  
pp. 1792 ◽  
Author(s):  
Yi-Lung Cheng ◽  
Ying-Lang Wang ◽  
Jin-Kun Lan ◽  
Sze-Au Wu ◽  
Shih-Chieh Chang ◽  
...  
Keyword(s):  
Silica Glass ◽  
Deep Submicron ◽  
High Density ◽  
Intermetal Dielectric ◽  
Density Plasma ◽  
Improve Metal

Control of high-density plasma sources for CVD and etching

Vacuum ◽  
1997 ◽  
Vol 48 (7-9) ◽  
pp. 659-664 ◽  
Author(s):  
K Suzuki ◽  
H Sugai ◽  
K Nakamura ◽  
TH Ahn ◽  
M Nagatsu
Keyword(s):  
High Density ◽  
Plasma Sources ◽  
Density Plasma

scholarly journals Studies on laser-driven generation of fast high-density plasma blocks for fast ignition

2006 ◽  
Vol 24 (2) ◽  
pp. 249-254 ◽  
Author(s):  
J. BADZIAK ◽  
S. GŁOWACZ ◽  
H. HORA ◽  
S. JABŁOŃSKI ◽  
J. WOŁOWSKI
Keyword(s):  
Proton Beam ◽  
Laser Energy ◽  
Skin Layer ◽  
Fast Ignition ◽  
High Density ◽  
Proton Density ◽  
Fast Ignitor ◽  
Ignition Threshold ◽  
Density Plasma

The properties of plasma (proton) block driven by the laser-induced skin-layer ponderomotive acceleration (S-LPA) mechanism are discussed. It is shown that the proton density of the plasma block is about a thousand times higher than that of the proton beam produced by the target normal sheath acceleration (TNSA) mechanism. Such a high-density plasma (proton) block can be considered as a fast ignitor of fusion targets. The estimates show that using the S-LPA driven plasma block, the ignition threshold for precompressed DT fuel can be reached at the ps laser energy ≤ 100 kJ.

Characterization of the CH4/H2/Ar high density plasma etching process for HgCdTe

1999 ◽  
Vol 28 (4) ◽  
pp. 347-354 ◽  
Author(s):  
C. R. Eddy ◽  
D. Leonhardt ◽  
V. A. Shamamian ◽  
J. R. Meyer ◽  
C. A. Hoffman ◽  
...  
Keyword(s):  
Plasma Etching ◽  
High Density ◽  
Etching Process ◽  
Plasma Etching Process ◽  
Density Plasma
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