Real-time, in situ film thickness metrology in a 10 Torr W chemical vapor deposition process using an acoustic sensor

2003 ◽  
Vol 21 (3) ◽  
pp. 1055 ◽  
Author(s):  
L. Henn-Lecordier ◽  
J. N. Kidder ◽  
G. W. Rubloff ◽  
C. A. Gogol ◽  
A. Wajid
Keyword(s):  
Chemical Vapor Deposition ◽  
Film Thickness ◽  
Real Time ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Process ◽  
Chemical Vapor Deposition Process ◽  
Acoustic Sensor ◽  
Vapor Deposition Process

scholarly journals In situ synthesis of multi-walled carbon nanorings by catalytic chemical vapor deposition process

2019 ◽  
Vol 9 (2) ◽  
pp. 119-126 ◽  
Author(s):  
Sivamaran Venkatesan ◽  
Balasubramanian Visvalingam ◽  
Gopalakrishnan Mannathusamy ◽  
Viswabaskaran Viswanathan ◽  
A. Gourav Rao
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Deposition Process ◽  
In Situ Synthesis ◽  
Chemical Vapor Deposition Process ◽  
Catalytic Chemical Vapor Deposition ◽  
Carbon Nanorings ◽  
Vapor Deposition Process
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