Copper drift in methyl-doped silicon oxide film

2002 ◽  
Vol 20 (5) ◽  
pp. 1987 ◽  
Author(s):  
Hao Cui ◽  
Ishwara B. Bhat ◽  
Shyam P. Murarka ◽  
Hongqiang Lu ◽  
Wei-Jen Hsia ◽  
...  
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon

scholarly journals ROOM-TEMPERATURE 1.54μm Er3+ PHOTOLUMINESCENCE FROM Er-DOPED SILICON-RICH SILICON OXIDE FILM GROWN BY MAGNETRON SPUTTERING

2001 ◽  
Vol 50 (12) ◽  
pp. 2487
Author(s):  
YUAN FANG-CHENG ◽  
RAN GUANG-ZHAO ◽  
CHAN YUAN ◽  
ZHANG BO-RUI ◽  
QIAO YONG-PING ◽  
...  
Keyword(s):  
Oxide Film ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon ◽  
Er Doped

Effect of deposition temperature on the bonding configurations and properties of fluorine doped silicon oxide film

2011 ◽  
Vol 520 (1) ◽  
pp. 35-40 ◽  
Author(s):  
Wei-Lun Lu ◽  
Ting-Wei Kuo ◽  
Chun-Hsien Huang ◽  
Na-Fu Wang ◽  
Yu-Zen Tsai ◽  
...  
Keyword(s):  
Oxide Film ◽  
Deposition Temperature ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon

Integration of a stack of two fluorine doped silicon oxide film with ULSI interconnect metallization

2004 ◽  
Vol 83 (1) ◽  
pp. 150-157 ◽  
Author(s):  
Y.L. Cheng ◽  
Y.L. Wang ◽  
C.P. Liu ◽  
Y.L. Wu ◽  
K.Y. Lo ◽  
...  
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon

Characterization of methyl-doped silicon oxide film for inter-layer dielectrics application

2001 ◽  
Author(s):  
Hao Cui ◽  
Hongqiang Lu ◽  
I. Bhat ◽  
S. Murarka ◽  
W. Lanford ◽  
...  
Keyword(s):  
Oxide Film ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Doped Silicon

The influence of carbon content in carbon-doped silicon oxide film by thermal treatment

2003 ◽  
Vol 435 (1-2) ◽  
pp. 165-169 ◽  
Author(s):  
Chang Sil Yang ◽  
Young-Hun Yu ◽  
Kwang-Man Lee ◽  
Heon-Ju Lee ◽  
Chi Kyu Choi
Keyword(s):  
Thermal Treatment ◽  
Oxide Film ◽  
Carbon Content ◽  
Silicon Oxide ◽  
Silicon Oxide Film ◽  
Carbon Doped ◽  
Doped Silicon
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