GaAs surface cleaning by low energy hydrogen ion beam treatment

2002 ◽  
Vol 20 (4) ◽  
pp. 1492-1497 ◽  
Author(s):  
N. Razek ◽  
K. Otte ◽  
T. Chassé ◽  
D. Hirsch ◽  
A. Schindler ◽  
...  
Keyword(s):  
Ion Beam ◽  
Surface Cleaning ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Gaas Surface ◽  
Ion Beam Treatment

GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures

2005 ◽  
Vol 97 (2) ◽  
pp. 023511 ◽  
Author(s):  
E. Schubert ◽  
N. Razek ◽  
F. Frost ◽  
A. Schindler ◽  
B. Rauschenbach
Keyword(s):  
Ion Bombardment ◽  
Surface Cleaning ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Gaas Surface

Permeation of hydrogen into silicon during low‐energy hydrogen ion beam bombardment

1987 ◽  
Vol 51 (7) ◽  
pp. 490-492 ◽  
Author(s):  
M. W. Horn ◽  
J. M. Heddleson ◽  
S. J. Fonash
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Hydrogen Ion

Low-energy ion beam treatment of α-Al2O3(0001) and improvement of photoluminescence of ZnO thin films

2004 ◽  
Vol 10 (4) ◽  
pp. 351-355 ◽  
Author(s):  
Jong-Young Park ◽  
Young-Soo No ◽  
Byung-Jun Park ◽  
Hyun-Woo Lee ◽  
Ji-Won Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Low Energy ◽  
Zno Thin Films ◽  
Ion Beam Treatment ◽  
Α Al2o3

Influence of low-energy ion-beam treatment by hydrogen on electrical activity of grain boundaries in polycrystalline silicon

Vacuum ◽  
2005 ◽  
Vol 78 (2-4) ◽  
pp. 269-272 ◽  
Author(s):  
A. Saad ◽  
A. Mazanik ◽  
A. Fedotov ◽  
J. Partyka ◽  
P. Węgierek ◽  
...  
Keyword(s):  
Electrical Activity ◽  
Grain Boundaries ◽  
Polycrystalline Silicon ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Treatment

scholarly journals A Sensitivity Enhanced MWCNT/PDMS Tactile Sensor Using Micropillars and Low Energy Ar+ Ion Beam Treatment

Sensors ◽  
2016 ◽  
Vol 16 (1) ◽  
pp. 93 ◽  
Author(s):  
Syed Hasan ◽  
Youngdo Jung ◽  
Seonggi Kim ◽  
Cho-Long Jung ◽  
Sunjong Oh ◽  
...  
Keyword(s):  
Ion Beam ◽  
Tactile Sensor ◽  
Low Energy ◽  
Ion Beam Treatment

scholarly journals Influence of Annealing on the Electrical Properties οf Cz-Si Wafers Previously Subjected to the Hydrogen Ion-Beam Treatment

2011 ◽  
Vol 120 (1) ◽  
pp. 108-110 ◽  
Author(s):  
A. Fedotov ◽  
O. Korolik ◽  
A. Mazanik ◽  
T. Kołtunowicz ◽  
P. Żukowski
Keyword(s):  
Electrical Properties ◽  
Ion Beam ◽  
Hydrogen Ion ◽  
Ion Beam Treatment

scholarly journals Enhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment

2013 ◽  
Vol 21 (13) ◽  
pp. 15888 ◽  
Author(s):  
Chuan-Feng Shih ◽  
Chu-Yun Hsiao ◽  
Kuan-Wei Su
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Treatment
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