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GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures
Journal of Applied Physics
◽
10.1063/1.1836858
◽
2005
◽
Vol 97
(2)
◽
pp. 023511
◽
Cited By ~ 10
Author(s):
E. Schubert
◽
N. Razek
◽
F. Frost
◽
A. Schindler
◽
B. Rauschenbach
Keyword(s):
Ion Bombardment
◽
Surface Cleaning
◽
Low Energy
◽
Hydrogen Ion
◽
Gaas Surface
Download Full-text
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GaAs surface cleaning by low energy hydrogen ion beam treatment
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.1488949
◽
2002
◽
Vol 20
(4)
◽
pp. 1492-1497
◽
Cited By ~ 19
Author(s):
N. Razek
◽
K. Otte
◽
T. Chassé
◽
D. Hirsch
◽
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◽
...
Keyword(s):
Ion Beam
◽
Surface Cleaning
◽
Low Energy
◽
Hydrogen Ion
◽
Gaas Surface
◽
Ion Beam Treatment
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Removal of a Thin SiO2Layer by Low-Energy Hydrogen Ion Bombardment at Elevated Temperatures
Japanese Journal of Applied Physics
◽
10.1143/jjap.28.2376
◽
1989
◽
Vol 28
(Part 1, No. 11)
◽
pp. 2376-2381
◽
Cited By ~ 11
Author(s):
Kiyoshi Miyake
Keyword(s):
Elevated Temperatures
◽
Ion Bombardment
◽
Low Energy
◽
Hydrogen Ion
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In situ substrate surface cleaning by low‐energy ion bombardment for high quality thin film formation
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.578730
◽
1993
◽
Vol 11
(2)
◽
pp. 307-313
◽
Cited By ~ 18
Author(s):
Y. Aoki
◽
S. Aoyama
◽
H. Uetake
◽
K. Morizuka
◽
T. Ohmi
Keyword(s):
Thin Film
◽
Film Formation
◽
Substrate Surface
◽
Ion Bombardment
◽
Surface Cleaning
◽
Low Energy
◽
High Quality
◽
Thin Film Formation
Download Full-text
Ultra-high vacuum direct bonding of a p–n junction GaAs wafer using low-energy hydrogen ion beam surface cleaning
Vacuum
◽
10.1016/j.vacuum.2006.12.003
◽
2007
◽
Vol 81
(8)
◽
pp. 974-978
◽
Cited By ~ 6
Author(s):
N. Razek
◽
A. Schindler
◽
B. Rauschenbach
Keyword(s):
Ion Beam
◽
High Vacuum
◽
Surface Cleaning
◽
Low Energy
◽
Ultra High Vacuum
◽
Hydrogen Ion
◽
Gaas Wafer
◽
Beam Surface
Download Full-text
Low‐energy hydrogen ion bombardment damage in silicon: An in situ optical investigation
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.574310
◽
1987
◽
Vol 5
(5)
◽
pp. 2797-2803
◽
Cited By ~ 6
Author(s):
R. W. Collins
◽
J. M. Cavese
Keyword(s):
Ion Bombardment
◽
Low Energy
◽
Hydrogen Ion
◽
Optical Investigation
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Impurity generation for low energy range of ion bombardment and its transport in a plasma
Journal of Nuclear Materials
◽
10.1016/s0022-3115(96)00708-8
◽
1997
◽
Vol 241-243
(1)
◽
pp. 1248-1252
Author(s):
M Kojima
Keyword(s):
Energy Range
◽
Ion Bombardment
◽
Low Energy
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Preliminary Results of Low Energy Sputter Yields of Boron Nitride due to Xenon Ion Bombardment (Preprint)
10.21236/ada484455
◽
2008
◽
Author(s):
James L. Topper
◽
Binyamin Rubin
◽
Cody C. Farnell
◽
Azer P. Yalin
Keyword(s):
Boron Nitride
◽
Ion Bombardment
◽
Low Energy
◽
Preliminary Results
Download Full-text
Evolution of plasmonic nanostructures under ultra-low-energy ion bombardment
Applied Surface Science
◽
10.1016/j.apsusc.2020.148672
◽
2021
◽
Vol 544
◽
pp. 148672
Author(s):
Lionel Simonot
◽
Florian Chabanais
◽
Sophie Rousselet
◽
Frédéric Pailloux
◽
Sophie Camelio
◽
...
Keyword(s):
Ion Bombardment
◽
Low Energy
◽
Plasmonic Nanostructures
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Observation of some new traps introduced by low-energy Ar+ ion bombardment on n-GaAs
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/0168-583x(91)95756-4
◽
1991
◽
Vol 59-60
◽
pp. 1023-1027
◽
Cited By ~ 2
Author(s):
A. Vaseashta
◽
L.C. Burton
Keyword(s):
Ion Bombardment
◽
Low Energy
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Surface morphology of low energy hydrogen ion eroded stainless steel
Radiation Effects
◽
10.1080/00337577908236964
◽
1979
◽
Vol 41
(3)
◽
pp. 185-186
◽
Cited By ~ 1
Author(s):
D. M. Mattox
◽
D. J. Sharp
Keyword(s):
Stainless Steel
◽
Surface Morphology
◽
Low Energy
◽
Hydrogen Ion
Download Full-text
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