Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates

Qi Jie Wang; Christian Pflügl; William F. Andress; Donhee Ham; Federico Capasso; Masamichi Yamanishi

doi:10.1116/1.2993176

Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2993176 ◽

2008 ◽

Vol 26 (6) ◽

pp. 1848-1851 ◽

Cited By ~ 17

Author(s):

Qi Jie Wang ◽

Christian Pflügl ◽

William F. Andress ◽

Donhee Ham ◽

Federico Capasso ◽

...

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Surface Acoustic Wave ◽

Wave Generation ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Acoustic Wave Generation ◽

Semiconductor Substrates

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Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices

Thin Solid Films ◽

10.1016/j.tsf.2008.12.008 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3378-3381 ◽

Cited By ~ 21

Author(s):

Wen-Ching Shih ◽

Hong-Yi Su ◽

Mu-Shiang Wu

Keyword(s):

Thin Films ◽

Acoustic Wave ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Surface Acoustic Wave ◽

High Frequency ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Si Substrate ◽

Acoustic Wave Devices

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Structures and properties of the Al-doped ZnO thin films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2011.03.026 ◽

2011 ◽

Vol 519 (16) ◽

pp. 5577-5581 ◽

Cited By ~ 26

Author(s):

Hongyun Yue ◽

Aimin Wu ◽

Yudong Feng ◽

Xueyu Zhang ◽

Tingju Li

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Structures And Properties ◽

Doped Zno

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Epitaxial growth of ZnO thin films on R-plane sapphire substrate by radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580437 ◽

1997 ◽

Vol 15 (3) ◽

pp. 1103-1107 ◽

Cited By ~ 68

Author(s):

Young Jin Kim ◽

Yoo Taek Kim ◽

Hyung Kook Yang ◽

Jong Chul Park ◽

Jung In Han ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Sapphire Substrate ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering

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Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering in terms of O2/Ar Mixture Flow Ratio

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2007.20.11.932 ◽

2007 ◽

Vol 20 (11) ◽

pp. 932-938 ◽

Cited By ~ 3

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Flow Ratio ◽

Radio Frequency Magnetron Sputtering ◽

Mixture Flow

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Physical properties of Cu and Dy co-doped ZnO thin films prepared by radio frequency magnetron sputtering for hybrid organic/inorganic electronic devices

Thin Solid Films ◽

10.1016/j.tsf.2019.06.027 ◽

2019 ◽

Vol 685 ◽

pp. 379-384 ◽

Cited By ~ 2

Author(s):

C. Locovei ◽

D. Coman ◽

A. Radu ◽

L. Ion ◽

V.A. Antohe ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Physical Properties ◽

Electronic Devices ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

Co Doped

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Highly transparent and conductive group IV impurity‐doped ZnO thin films prepared by radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578678 ◽

1993 ◽

Vol 11 (6) ◽

pp. 2975-2979 ◽

Cited By ~ 68

Author(s):

Hirotoshi Sato ◽

Tadatsugu Minami ◽

Shinzo Takata

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Group Iv ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Impurity Doped ◽

Doped Zno

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Effects of Growth Temperature on the Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering

Transactions on Electrical and Electronic Materials ◽

10.4313/teem.2009.10.6.185 ◽

2009 ◽

Vol 10 (6) ◽

pp. 185-188 ◽

Cited By ~ 48

Author(s):

Shin-Ho Cho

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Growth Temperature ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering

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Combined effect of oxygen deficient point defects and Ni doping in radio frequency magnetron sputtering deposited ZnO thin films

Thin Solid Films ◽

10.1016/j.tsf.2014.03.038 ◽

2014 ◽

Vol 562 ◽

pp. 37-42 ◽

Cited By ~ 17

Author(s):

B. Saha ◽

N.S. Das ◽

K.K. Chattopadhyay

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Point Defects ◽

Radio Frequency Magnetron ◽

Combined Effect ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Ni Doping ◽

Effect Of Oxygen

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Effect of Ru addition on the properties of Al-doped ZnO thin films prepared by radio frequency magnetron sputtering on polyethylene terephthalate substrate

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2007.10.034 ◽

2008 ◽

Vol 464 (1-2) ◽

pp. 89-94 ◽

Cited By ~ 21

Author(s):

Chi Shiung Hsi ◽

Boen Houng ◽

Bing Yi Hou ◽

Guo Ju Chen ◽

Shen Li Fu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Polyethylene Terephthalate ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

Polyethylene Terephthalate Substrate

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Properties of high velocity ZnO thin films for saw devices grown by radio frequency magnetron sputtering

2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) ◽

10.1109/spawda.2009.5428948 ◽

2009 ◽

Author(s):

Xu-ming Bian ◽

Rui Chen ◽

Bai-jie Fan ◽

Li Li ◽

Chun-he He ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

High Velocity ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering ◽

Saw Devices

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