Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas

2003 ◽  
Vol 21 (1) ◽  
pp. 251-264 ◽  
Author(s):  
S.-M. Suh ◽  
S. L. Girshick ◽  
U. R. Kortshagen ◽  
M. R. Zachariah
Keyword(s):  
Gas Phase ◽  
Inductively Coupled ◽  
Phase Nucleation

scholarly journals How volatile components catalyze vapor nucleation

2021 ◽  
Vol 7 (3) ◽  
pp. eabd9954 ◽  
Author(s):  
Chenxi Li ◽  
Jan Krohn ◽  
Martina Lippe ◽  
Ruth Signorell
Keyword(s):  
Gas Phase ◽  
Molecular Level ◽  
Volatile Components ◽  
Transient Species ◽  
Gaseous Species ◽  
Alternative Pathways ◽  
Nucleation Mechanisms ◽  
Designed Experiment ◽  
Phase Nucleation ◽  
Vapor Nucleation

Gas phase nucleation is a ubiquitous phenomenon in planetary atmospheres and technical processes, yet our understanding of it is far from complete. In particular, the enhancement of nucleation by the addition of a more volatile, weakly interacting gaseous species to a nucleating vapor has escaped molecular-level experimental investigation. Here, we use a specially designed experiment to directly measure the chemical composition and the concentration of nucleating clusters in various binary CO2-containing vapors. Our analysis suggests that CO2 essentially catalyzes nucleation of the low vapor pressure component through the formation of transient, hetero-molecular clusters and thus provides alternative pathways for nucleation to proceed more efficiently. This work opens up new avenues for the quantitative assessment of nucleation mechanisms involving transient species in multicomponent vapors.

Modeling analysis of gas phase nucleation in silicon carbide chemical vapor deposition

1999 ◽  
Vol 61-62 ◽  
pp. 176-178 ◽  
Author(s):  
A.N Vorob’ev ◽  
A.E Komissarov ◽  
A.S Segal ◽  
Yu.N Makarov ◽  
S.Yu Karpov ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Modeling Analysis ◽  
Phase Nucleation

Homogeneous gas-phase nucleation in silane pyrolysis

1994 ◽  
Vol 25 (1) ◽  
pp. 15-21 ◽  
Author(s):  
Frank Slootman ◽  
Jean-Claude Parent
Keyword(s):  
Gas Phase ◽  
Phase Nucleation

Direct Observation of Gas Phase Nucleation during Physical Vapor Transport Growth of Organic Single Crystals Using a Transparent Furnace

2009 ◽  
Vol 48 (11) ◽  
pp. 118003 ◽  
Author(s):  
Sawako Miyamoto ◽  
Toshihiro Shimada ◽  
Manabu Ohtomo ◽  
Akira Chikamatsu ◽  
Tetsuya Hasegawa
Keyword(s):  
Single Crystals ◽  
Gas Phase ◽  
Direct Observation ◽  
Vapor Transport ◽  
Physical Vapor Transport ◽  
Phase Nucleation

Homogeneous Gas Phase Nucleation of Silane in Low Pressure Chemical Vapor Deposition (LPCVD)

1988 ◽  
Vol 135 (9) ◽  
pp. 2378-2379 ◽  
Author(s):  
Z. M. Qian ◽  
H. Michiel ◽  
A. Van Ammel ◽  
J. Nijs ◽  
R. Mertens
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phase Nucleation

The role of total pressure in gas-phase nucleation: A diffusion effect

2003 ◽  
Vol 118 (2) ◽  
pp. 736-745 ◽  
Author(s):  
S.-M. Suh ◽  
S. L. Girshick ◽  
M. R. Zachariah
Keyword(s):  
Gas Phase ◽  
Total Pressure ◽  
Diffusion Effect ◽  
Phase Nucleation
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