Nonclassical impedance control of the high rate midfrequency reactive magnetron sputter process using harmonic analysis

2001 ◽  
Vol 19 (5) ◽  
pp. 2368-2372 ◽  
Author(s):  
N. Malkomes ◽  
B. Szyszka
Keyword(s):  
Harmonic Analysis ◽  
Impedance Control ◽  
High Rate ◽  
Reactive Magnetron ◽  
Magnetron Sputter

High rate reactive magnetron sputter deposition of titanium oxide

2008 ◽  
Vol 92 (22) ◽  
pp. 221501 ◽  
Author(s):  
T. Kubart ◽  
D. Depla ◽  
D. M. Martin ◽  
T. Nyberg ◽  
S. Berg
Keyword(s):  
Titanium Oxide ◽  
Sputter Deposition ◽  
High Rate ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method

2011 ◽  
Vol 520 (4) ◽  
pp. 1178-1181 ◽  
Author(s):  
Yu Muto ◽  
Nobuto Oka ◽  
Naoki Tsukamoto ◽  
Yoshinori Iwabuchi ◽  
Hidefumi Kotsubo ◽  
...  
Keyword(s):  
Control Method ◽  
Impedance Control ◽  
Reactive Sputtering ◽  
High Rate

Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)

2015 ◽  
Vol 39 ◽  
pp. 702-710 ◽  
Author(s):  
M. Junaid ◽  
Y.-T. Chen ◽  
J. Palisaitis ◽  
M. Garbrecht ◽  
C.-L. Hsiao ◽  
...  
Keyword(s):  
Reactive Magnetron ◽  
High Quality ◽  
Magnetron Sputter

scholarly journals High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

2016 ◽  
Vol 13 (10) ◽  
pp. 960-964 ◽  
Author(s):  
Rafael Alvarez ◽  
Aurelio Garcia-Valenzuela ◽  
Carmen Lopez-Santos ◽  
Francisco J. Ferrer ◽  
Victor Rico ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron
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