scholarly journals High-Rate Deposition of Stoichiometric Compounds by Reactive Magnetron Sputtering at Oblique Angles

2016 ◽  
Vol 13 (10) ◽  
pp. 960-964 ◽  
Author(s):  
Rafael Alvarez ◽  
Aurelio Garcia-Valenzuela ◽  
Carmen Lopez-Santos ◽  
Francisco J. Ferrer ◽  
Victor Rico ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron

High-rate deposition of Ta-doped SnO2 films by reactive magnetron sputtering using a Sn–Ta metal-sintered target

2012 ◽  
Vol 520 (10) ◽  
pp. 3746-3750 ◽  
Author(s):  
Y. Muto ◽  
S. Nakatomi ◽  
N. Oka ◽  
Y. Iwabuchi ◽  
H. Kotsubo ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron

High rate deposition of mixed oxides by controlled reactive magnetron-sputtering from metallic targets

2012 ◽  
Vol 520 (12) ◽  
pp. 4122-4126 ◽  
Author(s):  
Stefan Bruns ◽  
Michael Vergöhl ◽  
Oliver Werner ◽  
Till Wallendorf
Keyword(s):  
Magnetron Sputtering ◽  
Mixed Oxides ◽  
Reactive Magnetron Sputtering ◽  
High Rate ◽  
Reactive Magnetron
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